Family-based scheduling rules of a sequence-dependent wafer fabrication system

Consider the dispatch problem for a wafer fabrication where production process is divided into hundreds of operations and takes a few months to complete. In the process, wafers have to go through similar operations several times repeatedly for different layers of circuit, called job re-entrances. General family-based scheduling rules are proved to perform better than the individual job scheduling rule in terms of machine utilization for multiserver and multiple job re-entrance manufacturing systems under the condition that with a positive possibility, a queue exists in front of steppers. Five special family-based scheduling rules are constructed, of which FCFS-F, SRPT-F, EDD-F, and LS-F are modified from previous well-known scheduling rules, while SDA-F is a rule-based algorithm, using threshold control and least slack principles. A simulation model is built to evaluate the performances of these five family-based rules by using the information collected from a wafer fab located in Hsin-Chu, Taiwan. As a result, SDA-F is shown to perform best among all five rules, followed by LS-F and FCFS-F.

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