Design and Characterization of a Micromachined Piezoelectric Microphone

*† ‡ ‡ This paper presents the development of a micromachined piezoelectric microphone for aeroacoustic measurement applications. The microphone consists of a circular diaphragm of silicon possessing a thin annular ring of piezoelectric material deposited at the edge of the diaphragm. The microphone was designed by combining a linear piezoelectric composite plate model with a lumped-element, electroacoustic model. Experimental characterization indicates a

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