The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems

Abstract A new experimental device has been designed and produced with the purpose of investigating the possible effect of nano-scale interaction forces on the reliability issue related to pull-in of uncharged plates. This paper reports the outcomes of the experimental tests carried out on the aforementioned micro-structure, which presents the essential features of real-life MEMS and is produced using the same technology as standard commercial devices. The experiments show, with a high degree of repeatability, a premature failure of the structure, as a consequence of pull-in instability. The results of the tests are critically evaluated by comparison with theoretical predictions, in order to assess the role played by nano-scale interaction forces caused by, e.g., parasitic charging, contact and patch potentials, Casimir force.

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