论文信息 - Towards simultaneous achievement of carrier activation and crystallinity in Ge and GeSn with heated phosphorus ion implantation: An optical study - 字舞流文

Towards simultaneous achievement of carrier activation and crystallinity in Ge and GeSn with heated phosphorus ion implantation: An optical study

T. K. Chan | Y. Yeo | Lanxiang Wang | V. D'costa | L. Chua | W. Zou | T. Henry | E. Tok | Wei Wang | T. Osipowicz | C. Hatem | S. L. Lim | T. Chan | Sin Leng Lim | V. D’Costa