Sub-/spl mu/s switching time in silicon-on-insulator Mach-Zehnder thermooptic switch

We have demonstrated both rise and fall times below 1 /spl mu/s with 10%-90% modulation in a silicon-on-insulator thermooptical Mach-Zehnder switch. The switch is based on 9-/spl mu/m-thick and 10-/spl mu/m-wide single-mode rib waveguides. Very fast switching was achieved by using a differential control method. The switch was driven with a digital signal processor accompanied by simple electronic circuitry.