论文信息 - Integrated High Power Micro Magnets for MEMS Sensors and Actuators - 字舞流文

Integrated High Power Micro Magnets for MEMS Sensors and Actuators

B. Wagner | T. Lisec | L. Blohm | F. Lofink | S. Gu-Stoppel | F. Niekiel | M. Bodduluri | I. Pieper | A. Schulz-Walsemann