Silicon Photonics Carrier Depletion Modulators Capable of 85Gbaud 16QAM and 64Gbaud 64QAM

We achieved high performance silicon photonics carrier-depletion Mach-Zehnder modulation with a commercial foundry by optimizing doping and device design. We demonstrated IQ modulator operating at 85Gbaud 16QAM and 64Gbaud 64 QAM with >25dB extinction ratio.

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