Materials Optimization for Magnetic MEMS
暂无分享,去创建一个
[1] J. Dean,et al. Finite-element analysis on cantilever beams coated with magnetostrictive material , 2006, IEEE Transactions on Magnetics.
[2] A. J. Jacobs-Cook,et al. Piezomagnetic tuning of a micromachined resonator , 1996 .
[3] H. Chiriac,et al. Fe-based amorphous thin film as a magnetoelastic sensor material , 2000 .
[4] Jack W. Judy,et al. Microelectromechanical systems (MEMS): fabrication, design and applications , 2001 .
[5] James Weston,et al. Growth and magnetic characterization of epitaxial Fe81Ga19∕MgO (100) thin films , 2005 .
[6] M. Gibbs,et al. The use of stress for the control of magnetic anisotropy in amorphous FeSiBC thin films: a magneto-optic study , 1998 .
[7] J. Livingston,et al. Magnetomechanical Properties of Amorphous Metals , 1982, April 16.
[8] Masahiro Yamaguchi,et al. Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films , 1997 .
[9] Ilene J. Busch‐Vishniac. The case for magnetically driven microactuators , 1992 .
[10] Marilyn Wun-Fogle,et al. Magnetostrictive properties of body-centered cubic Fe-Ga and Fe-Ga-Al alloys , 2000 .
[11] M. Gibbs,et al. Anisotropy and magnetostriction in metallic glasses , 1992 .
[12] P. Squire,et al. Delta E effect in obliquely field annealed METGLAS R2605SC , 1989 .
[13] C. Shearwood,et al. Growth and patterning of amorphous FeSiBC films , 1996 .
[14] Henryk Szymczak,et al. Finite-element modelling of magnetostrictive bending of a coated cantilever , 1997 .
[15] G. Reyne,et al. Magnetic micro-actuators and systems (MAGMAS) , 2003 .
[16] M.R.J. Gibbs,et al. Magnetic materials for MEMS applications , 2004 .
[17] M. Gibbs,et al. Sputter deposition of compositional gradient magnetostrictive FeCo based thin films , 2001 .
[18] R. C. Hall. Single‐Crystal Magnetic Anisotropy and Magnetostriction Studies in Iron‐Base Alloys , 1960 .
[19] Craig A. Grimes,et al. Remote query pressure measurement using magnetoelastic sensors , 1999 .
[20] R. C. Wetherhold,et al. Strain and stress calculation in bulk magnetostrictive materials and thin films , 2004 .
[21] Petr I. Nikitin,et al. Deposition of thin ferromagnetic films for application in magnetic sensor microsystems , 1998 .
[22] H. Craighead,et al. Attogram detection using nanoelectromechanical oscillators , 2004 .
[23] R. C. Hall. Magnetic Anisotropy and Magnetostriction of Ordered and Disordered Cobalt-Iron Alloys , 1960 .
[24] E. Hristoforou,et al. Magnetoelastic characterization of thin films dedicated to magnetomechanical microsensor applications , 1998 .
[25] Gilbert Reyne,et al. Modelling of Magnetostrictive Thin Films, Application to a Micromembrane , 1997 .
[26] M. Yamaguchi,et al. Fabrication of magnetostrictive actuators using rare‐earth (Tb,Sm)‐Fe thin films (invited) , 1994 .