论文信息 - Metal/Insulator/Semiconductor contacts for ultimately scaled CMOS nodes: Projected benefits and remaining challenges - 字舞流文

Metal/Insulator/Semiconductor contacts for ultimately scaled CMOS nodes: Projected benefits and remaining challenges

H. Grampeix | E. Dubois | M. Vinet | L. Hutin | F. Nemouchi | Y. Morand | J. Borrel | M. Grégoire | E. Nolot | G. Rodriguez | Magali Tessaire