Calibrated soft x‐ray spectroscopy using transmission grating, pinhole and film

The combination of transmission diffraction grating (free‐standing gold bars), pinhole and film can be used for quantitative measurements of the x‐ray spectra in the 0.1–1.5‐keV region by adopting the procedures described. The steps consist of film calibration and deconvolution of overlapping contributions from different spectral orders. In addition, spatial resolution is available in the direction perpendicular to the dispersion axis for each x‐ray energy. The working example presented is the characterization of an x‐ray source created by a laser‐target interaction, for possible use in x‐ray microscopy or x‐ray lithography.

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