Patterning process and actuation in open air of micro-beam actuator based on conducting IPNs

We report on new method to obtain micrometric electroactive polymer actuators operating in air. High speed conducting Interpenetrating Polymer Network (IPN) microactuators are synthesized and fully characterized. The IPN architecture used in this work allows solving the interface and adhesion problems, which have been reported in the design of classical conducting polymer-based actuators. We demonstrated that it is possible to reduce the thickness of these actuators by a specific synthetic pathway. IPN host matrixes based on polyethylene oxide / polytetrahydrofurane have been shaped by hot pressing. Then, the resulting thin host matrixes (below 10 μm) are compatible with the microfabrication technologies. After interpenetration of poly(3,4-ethylenedioxythiophene) (PEDOT), these electroactive materials are micro-sized using dry etching process. Frequency responses and displacement have been characterized by scanning electronic microscopy. These conducting IPN microactuators can be considered as potential candidates in numerous low frequency applications, including micro-valves, micro-optical instrumentation and micro-robotics.

[1]  Jie Ding,et al.  High performance conducting polymer actuators utilising a tubular geometry and helical wire interconnects , 2003 .

[2]  Cédric Plesse,et al.  Synthesis and characterization of conducting interpenetrating polymer networks for new actuators , 2005 .

[3]  R. Baughman.  Conducting polymer artificial muscles , 1996 .

[4]  C. Plesse,et al.  Polyethylene oxide–polytetrahydrofurane–PEDOT conducting interpenetrating polymer networks for high speed actuators , 2011 .

[5]  E. Smela.  Conjugated Polymer Actuators for Biomedical Applications , 2003 .

[6]  Toshiyuki Watanabe,et al.  High Ionic Conductivity of Polyether-Based Network Polymer Electrolytes with Hyperbranched Side Chains , 1999 .

[7]  E. Smela.  Microfabrication of PPy microactuators and other conjugated polymer devices , 1999 .

[8]  U. Lemmer,et al.  Plasma patterning of Poly(3,4-ethylenedioxythiophene):Poly(styrenesulfonate) anodes for efficient polymer solar cells , 2009 .

[9]  C. Plesse,et al.  Poly(ethylene oxide)/polybutadiene based IPNs synthesis and characterization , 2007 .

[10]  D. Klempner,et al.  Interpenetrating Polymer Networks , 1994 .

[11]  Q. Wahab,et al.  New materials for micro-scale sensors and actuators An engineering review , 2007 .

[12]  I. Lundström,et al.  Microrobots for micrometer-size objects in aqueous media: potential tools for single-cell manipulation. , 2000, Science.

[13]  María Teresa Cortés,et al.  Artificial Muscles with Tactile Sensitivity , 2003 .

[14]  Gursel Alici,et al.  Conducting polymer microactuators operating in air , 2009 .

[15]  M. Berggren,et al.  Organic electronics for precise delivery of neurotransmitters to modulate mammalian sensory function. , 2009, Nature materials.

[16]  K. Asaka,et al.  Actuator properties of the complexes composed by carbon nanotube and ionic liquid: The effects of additives , 2009 .

[17]  Xiaobo Tan,et al.  Author's Personal Copy Sensors and Actuators A: Physical a Novel Diaphragm Micropump Actuated by Conjugated Polymer Petals: Fabrication, Modeling, and Experimental Results , 2022 .

[18]  Edwin Jager,et al.  Translating Electronic Currents to Precise Acetylcholine–Induced Neuronal Signaling Using an Organic Electrophoretic Delivery Device , 2009 .

[19]  Cédric Plesse,et al.  Conducting interpenetrating polymer network sized to fabricate microactuators , 2011 .

[20]  C. Plesse,et al.  Long-life air working conducting semi-IPN/ionic liquid based actuator , 2004 .