Electrical properties of extended defects in 4H-SiC investigated by photoinduced current measurements

We study the correlation between crystal quality and electrical transport in 4H-SiC by micro-photoluminescence and laser-beam-induced photocurrent measurements. A focused HeCd laser at 325 nm has been employed to simultaneously measure, with a spatial resolution of a few microns, both the photoluminescence and current–voltage characteristics of 4H-SiC Schottky diodes. We found that the laser-induced photocurrent acquired along a defect can give information on its spatial distribution in depth and that the local minority carrier lifetime and generation depend on the type of stacking fault, both decreasing for defects with deeper intragap levels.

[1]  Electrical Properties of Defects in 4H-SiC Investigated by Photo-Induced-Currents Measurements , 2016 .

[2]  T. Kimoto,et al.  Triple Shockley type stacking faults in 4H-SiC epilayers , 2009 .

[3]  R. Stahlbush,et al.  Mitigating Defects within Silicon Carbide Epitaxy , 2011 .

[4]  H. Tsuchida,et al.  Photoluminescence of Frank-type defects on the basal plane in 4H–SiC epilayers , 2010 .

[5]  A. Agarwal,et al.  10-kV, 123-m/spl Omega//spl middot/cm/sup 2/ 4H-SiC power DMOSFETs , 2004, IEEE Electron Device Letters.

[6]  K. Hobart,et al.  Characterization of defects in the drift region of 4H-SiC pin diodes via optical beam induced current , 2006 .

[7]  S. Sze,et al.  Physics of Semiconductor Devices: Sze/Physics , 2006 .

[8]  J. Bergman,et al.  The determination of high-density carrier plasma parameters in epitaxial layers, semi-insulating and heavily doped crystals of 4H-SiC by a picosecond four-wave mixing technique , 2006 .

[9]  P. Delugas,et al.  Systematic first principles calculations of the effects of stacking faults defects on the 4H-SiC band structure , 2010 .

[10]  Bin Chen,et al.  Electron-beam-induced current study of stacking faults and partial dislocations in 4H-SiC Schottky diode , 2008 .

[11]  Robert G. Azevedo,et al.  Silicon Carbide Microsystems for Harsh Environments , 2011 .

[12]  Salvo Coffa,et al.  Ion Implantation Defects in 4H-SiC DIMOSFET , 2016 .

[13]  Otwin Breitenstein,et al.  Light beam induced current and infrared thermography studies of multicrystalline silicon solar cells , 2004 .

[14]  Tsunenobu Kimoto,et al.  Investigation of carrier lifetime in 4H-SiC epilayers and lifetime control by electron irradiation , 2007 .

[15]  T. Kimoto Material science and device physics in SiC technology for high-voltage power devices , 2015 .

[16]  Bin Chen,et al.  In situ monitoring of stacking fault formation and its carrier lifetime mediation in p-type 4H-SiC , 2014 .

[17]  Giuseppe Pistone,et al.  Epitaxial Layers Grown with HCl Addition: A Comparison with the Standard Process , 2006 .

[18]  T. Kimoto,et al.  Structural and electronic characterization of (2,33) bar-shaped stacking fault in 4H-SiC epitaxial layers , 2011 .

[19]  G. Foti,et al.  4h SiC epitaxial growth with chlorine addition , 2006 .

[20]  K. Hobart,et al.  Thermal Annealing and Propagation of Shockley Stacking Faults in 4H-SiC PiN Diodes , 2007 .

[21]  A. La Magna,et al.  Mechanisms of growth and defect properties of epitaxial SiC , 2014 .

[22]  K. Lew,et al.  Basal plane dislocation reduction for 8° off-cut, 4H-SiC using in situ variable temperature growth interruptions , 2008 .

[23]  Marek Skowronski,et al.  Degradation of hexagonal silicon-carbide-based bipolar devices , 2006 .

[24]  Bin Chen,et al.  Tuning minority-carrier lifetime through stacking fault defects: The case of polytypic SiC , 2012 .

[25]  P. Klein,et al.  Recombination processes controlling the carrier lifetime in n-4H-SiC epilayers with low Z1/2 concentrations , 2010 .

[26]  A. Magna,et al.  Electron backscattering from stacking faults in SiC by means ofab initioquantum transport calculations , 2012, 1206.6600.