Thermally induced deformations in electron microscopy: challenges and opportunities for system identification

Thermal effects are becoming increasingly important in efforts to enhance the performance of electron microscopes. Therefore, accurate thermal-mechanical models are desired for analysis and control. Modelling thermal systems from experimental data, i.e. system identification, is challenging due to large transients, large time scales, excitation signal limitations, large environmental disturbances, and nonlinear behaviour. An identification framework has been developed to address these issues. The presented approach facilitates the implementation of advanced control techniques and error compensation strategies by providing high-fidelity models.