MEMS accelerometers for mechanical vibrations analysis: a comprehensive review with applications

In this paper, the use of MEMS accelerometers for measuring mechanical vibrations is presented. Also a wide review of the literature is performed by presenting the uses of the MEMS accelerometers in a great number of applications. These sensors are known for their low prices, low power consumption and low sizes, which enhance their use in applications such as energy harvesters, monitoring processes and for educational purposes. In order to propose these sensors for measuring vibrations, a complete evaluation of the MEMS accelerometers was performed by measuring amplitudes and frequencies of oscillations and comparing their dynamic characteristics with other accelerometers with higher precision. Moreover, two experiments were conducted: In the first one, the measurements of the amplitude given by a MEMS and a standard accelerometer while being excited with sinusoidal waves with different frequencies using a vibration exciter were taken and compared. For the second experiment, three MEMS sensors and a piezoelectric accelerometer were used to measure the accelerations of a 3-DOF shear-building excited by an unbalanced DC motor. The signals obtained were compared in the time and frequency domains; for the last case, the wavelet transform, the wavelet coherence and the power spectrum density were used.

[1]  M. Sgroi,et al.  From Modeling to Implementation of Virtual Sensors in Body Sensor Networks , 2012, IEEE Sensors Journal.

[2]  K. Sumangala,et al.  Design and Analysis of MEMS Comb Drive Capacitive Accelerometer for SHM and Seismic Applications , 2016 .

[3]  Liqun Hou,et al.  Induction motor fault diagnosis using industrial wireless sensor networks and Dempster-Shafer classifier fusion , 2011, IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society.

[4]  N. Kasagi,et al.  The development of a high-performance perfluorinated polymer electret and its application to micro power generation , 2008 .

[5]  Fernando S. Schlindwein,et al.  Comparison of integrated micro-electrical-mechanical system and piezoelectric accelerometers for machine condition monitoring , 2006 .

[6]  C. Furlong,et al.  Dynamic analysis and characterization of MEMS accelerometers by computational and opto-electromechanical methodologies , 2005, 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual..

[7]  C. Torrence,et al.  A Practical Guide to Wavelet Analysis. , 1998 .

[8]  Yuming Fang,et al.  A MEMS based piezoelectric vibration energy harvester for fault monitoring system , 2018 .

[9]  Henry A. Sodano,et al.  A review of power harvesting using piezoelectric materials (2003–2006) , 2007 .

[10]  Jong-Duk Son,et al.  Development of smart sensors system for machine fault diagnosis , 2009, Expert Syst. Appl..

[11]  E. Koukharenko,et al.  Fabrication and Test of Integrated Micro-Scale Vibration Based Electromagnetic Generator , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[12]  K. Natarajan,et al.  Induction motor fault detection and diagnosis by vibration analysis using MEMS accelerometer , 2013, 2013 International Conference on Emerging Trends in Communication, Control, Signal Processing and Computing Applications (C2SPCA).

[13]  Z. Celik-Butler,et al.  Surface Micromachined MEMS Accelerometers on Flexible Polyimide Substrate , 2011, IEEE Sensors Journal.

[14]  K. Najafi,et al.  Energy Scavenging From Low-Frequency Vibrations by Using Frequency Up-Conversion for Wireless Sensor Applications , 2008, IEEE Sensors Journal.

[15]  Y. Sakane,et al.  Development of high-performance perfuluoriented polymer electret film and its application to micro power generation , 2008 .

[16]  Denis Gillet,et al.  The Cockpit: An Effective Metaphor for Web-based Experimentation in Engineering Education* , 2003 .

[17]  Hassan Ghasemzadeh,et al.  Multi-sensor fusion in body sensor networks: State-of-the-art and research challenges , 2017, Inf. Fusion.

[18]  Chengkuo Lee,et al.  Hybrid energy harvester based on piezoelectric and electromagnetic mechanisms , 2010 .

[19]  Martin Schätz,et al.  Complex continuous wavelet coherence for EEG microstates detection in insight and calm meditation , 2014, Consciousness and Cognition.

[20]  Alaa Abdulhady Jaber,et al.  Real-Time Wavelet Analysis of a Vibration Signal Based on Arduino-UNO and LabVIEW , 2015 .

[21]  Daniel J. Inman,et al.  IMPEDANCE-BASED HEALTH MONITORING OF CIVIL STRUCTURAL COMPONENTS , 2000 .

[22]  Rosario Miceli,et al.  Piezoelectric Rainfall Energy Harvester Performance by an Advanced Arduino-Based Measuring System , 2018, IEEE Transactions on Industry Applications.

[23]  Tadeusz Uhl,et al.  Structural damage detection using wireless passive sensing platform based on RFID technology , 2016 .

[24]  Marcus Varanis,et al.  Instrumentation for mechanical vibrations analysis in the time domain and frequency domain using the Arduino platform , 2016 .

[25]  Hanlin Sheng,et al.  MEMS-based low-cost strap-down AHRS research , 2015 .

[26]  Yong Xu,et al.  Haircell-inspired capacitive accelerometer with both high sensitivity and broad dynamic range , 2010, 2010 IEEE Sensors.

[27]  Dibin Zhu,et al.  A SELF POWERED TAG FOR WIRELESS STRUCTURE HEALTH MONITORING IN AERONAUTICAL APPLICATIONS , 2009 .

[28]  Grantham Pang,et al.  Evaluation of a Low-cost MEMS Accelerometer for Distance Measurement , 2001, J. Intell. Robotic Syst..

[29]  Jyoti K. Sinha,et al.  A typical filter design to improve the measured signals from MEMS accelerometer , 2010 .

[30]  Y. Suzuki,et al.  Low-Resonant-Frequency Micro Electret Generator for Energy Harvesting Application , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[31]  Giacomo Navarra,et al.  Structural monitoring of “Himera” viaduct by low-cost MEMS sensors: characterization and preliminary results , 2017 .

[32]  Nicholas A Alexander,et al.  Economic MEMS based 3-axis water proof accelerometer for dynamic geo-engineering applications , 2012 .

[33]  Dawei Zheng.  Future Communication, Information and Computer Science , 2015 .

[34]  Abderrezak Guessoum,et al.  FPGA-based wireless sensor nodes for vibration monitoring system and fault diagnosis , 2017 .

[35]  Tomasz Barszcz,et al.  How to Build a Vibration Monitoring System on Your Own , 2018 .

[36]  Chin-Hsiung Loh,et al.  Angular velocity-based structural damage detection , 2016, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[37]  Pedro José Marrón,et al.  Wireless Structural Health Monitoring Using MEMS , 2005 .

[38]  Lizy Abraham,et al.  Analysis of vibration and acoustic sensors for machine health monitoring and its wireless implementation for low cost space applications , 2014, 2014 First International Conference on Computational Systems and Communications (ICCSC).

[39]  Yao Yan,et al.  Proof-of-concept prototype development of the self-propelled capsule system for pipeline inspection , 2017, Meccanica.

[40]  Hu Lin,et al.  Machine Tool Vibration Fault Monitoring System Based on Internet of Things , 2014, CWSN.

[41]  Smail Zouggar,et al.  Real Time Study of P&O MPPT Control for Small Wind PMSG Turbine Systems Using Arduino Microcontroller ☆ , 2017 .

[42]  Jan M. Rabaey,et al.  A study of low level vibrations as a power source for wireless sensor nodes , 2003, Comput. Commun..

[43]  Paul K. Wright,et al.  A piezoelectric vibration based generator for wireless electronics , 2004 .

[44]  Kok Swee Leong,et al.  Demonstration of self-powered accelerometer using piezoelectric micro-power generator , 2013, 2013 IEEE Student Conference on Research and Developement.

[45]  R. Gao,et al.  Micromachined microsensors for manufacturing , 2004, IEEE Instrumentation & Measurement Magazine.

[46]  Alessandro Sabato,et al.  Feasibility of Frequency-Modulated Wireless Transmission for a Multi-Purpose MEMS-Based Accelerometer , 2014, Sensors.

[47]  Ann Marie Sastry,et al.  Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems , 2008 .

[48]  Geoff V. Merrett,et al.  Vibration-powered sensing system for engine condition monitoring , 2012 .

[49]  Alexandre Bounouh,et al.  Resonant frequency characterization of MEMS based energy harvesters by harmonic sampling analysis method , 2014 .

[50]  Andrei M. Shkel,et al.  Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers , 2003 .

[51]  Yan Yu,et al.  Design of a wireless measurement system based on WSNs for large bridges , 2014 .

[52]  K. Panduranga Vittal,et al.  Electrical Fault Detection in Three Phase Squirrel Cage Induction Motor by Vibration Analysis using MEMS Accelerometer , 2005, 2005 International Conference on Power Electronics and Drives Systems.

[53]  Othman Sidek,et al.  A review of vibration-based MEMS piezoelectric energy harvesters , 2011 .

[54]  Andrew Starr,et al.  Suitability of MEMS Accelerometers for Condition Monitoring: An experimental study , 2008, Sensors.

[55]  Srinivasan Chandrasekaran,et al.  Structural Health Monitoring of Offshore Structures Using Wireless Sensor Networking under Operational and Environmental Variability , 2015 .

[56]  Shekar Patil,et al.  Sensor Based Bridge Condition Monitoring System Using GSM , 2015 .

[57]  Marisa Almeida Cavalcante,et al.  Física com Arduino para iniciantes , 2011 .

[58]  Andrew Starr,et al.  Performance Evaluation of MEMS Accelerometers , 2009 .

[59]  S. Kavitha,et al.  A simple analytical design approach based on computer aided analysis of bulk micromachined piezoresistive MEMS accelerometer for concrete SHM applications , 2013 .

[60]  Monica D. Kohler,et al.  ShakeNet: A portable wireless sensor network for instrumenting large civil structures , 2015 .

[61]  Sung-Han Sim,et al.  Development and Application of High-Sensitivity Wireless Smart Sensors for Decentralized Stochastic Modal Identification , 2012 .

[62]  Krzysztof Tomczyk,et al.  Special signals in the calibration of systems for measuring dynamic quantities , 2014 .

[63]  Daniel Mihai Toma,et al.  Experimental validation and modeling of plucked piezoelectric for underwater energy harvesting system , 2014 .

[64]  Lei Deng,et al.  Development of high synchronous acquisition accuracy wireless sensor network for machine vibration monitoring , 2015 .

[65]  Thomas W. Kenny,et al.  A high-precision, wide-bandwidth micromachined tunneling accelerometer , 2001 .

[66]  Srinivas Tadigadapa,et al.  Piezoelectric MEMS sensors: state-of-the-art and perspectives , 2009 .

[67]  Emerson . Galdino,et al.  DEVELOPMENT OF LOW-COST WIRELESS ACCELEROMETER FOR STRUCTURAL DYNAMIC MONITORING , 2017 .

[68]  Chengkuo Lee,et al.  Electromagnetic energy harvesting from vibrations of multiple frequencies , 2009 .

[69]  Alaa Abdulhady Jaber,et al.  Design of a Wireless Sensor Node for Vibration Monitoring of Industrial Machinery , 2016 .

[70]  Heikki Seppä,et al.  Microelectromechanical systems in electrical metrology , 2001, IEEE Trans. Instrum. Meas..

[71]  Andreas Schütze,et al.  A contribution for increasing the interest of high-school students for MEMS technology, engineering, and physics , 2007 .

[72]  Chiman Kwan,et al.  Wireless health monitoring system for vibration detection of induction motors , 2010, 2010 IEEE Industrial and Commercial Power Systems Technical Conference - Conference Record.

[73]  Gil Zussman,et al.  Movers and Shakers: Kinetic Energy Harvesting for the Internet of Things , 2013, IEEE Journal on Selected Areas in Communications.

[74]  Jerome P. Lynch,et al.  Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring , 2003 .

[75]  Colin P. Ratcliffe,et al.  Investigation into the use of low cost MEMS accelerometers for vibration based damage detection , 2008 .

[76]  Roozbeh Jafari,et al.  Enabling Effective Programming and Flexible Management of Efficient Body Sensor Network Applications , 2013, IEEE Transactions on Human-Machine Systems.

[77]  Franco Giuseppe Dedini,et al.  Comparison between two models of BLDC motor, simulation and data acquisition , 2018 .

[78]  Danelle M. Tanner,et al.  Non-destructive resonant frequency measurement on MEMS actuators , 2001, 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167).

[79]  Robert X. Gao,et al.  Wavelets for fault diagnosis of rotary machines: A review with applications , 2014, Signal Process..

[80]  H. F. Helbig,et al.  A system for automatic electrical and optical characterization of microelectromechanical devices , 1999 .

[81]  John Sarik,et al.  Lab kits using the Arduino prototyping platform , 2010, 2010 IEEE Frontiers in Education Conference (FIE).

[82]  Salvatore Baglio,et al.  A low cost multi-sensor approach for early warning in structural monitoring of buildings and structures , 2014, 2014 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings.

[83]  Ruize Xu,et al.  MEMS Accelerometer Based Nonspecific-User Hand Gesture Recognition , 2012, IEEE Sensors Journal.

[84]  Hou Xiaoyan,et al.  Structural Motion Monitoring Using 9-Axis Sensing Modules with Wireless Communication Capability , 2016, ICRA 2016.

[85]  Xinrong Li,et al.  Wireless Sensor Network System Design Using Raspberry Pi and Arduino for Environmental Monitoring Applications , 2014, FNC/MobiSPC.

[86]  Lingling Xu,et al.  MEMS-based rotary strapdown inertial navigation system , 2013 .

[87]  Jong-Duk Son,et al.  An availability of MEMS-based accelerometers and current sensors in machinery fault diagnosis , 2016 .

[88]  Apurva Mane,et al.  Vehicle Collision detection and Remote Alarm Device using Arduino , 2014 .

[89]  Eric M. Yeatman,et al.  Performance limits of the three MEMS inertial energy generator transduction types , 2007 .

[90]  Seong-Rak Rim,et al.  Vibration Measurement of Wireless Sensor Nodes for Structural Health Monitoring , 2015 .