Metal transfer assisted nanolithography on rigid and flexible substrates

A nanolithography technique based on metal transfer printing is demonstrated. The transferred metal conveniently acts as an etch mask for pattern transfer to a substrate. This lithography technique can be used on flexible plastic substrate as well as on rigid substrate due to the low pressure and temperature used in the metal transfer process. Dense nanosize metal particle arrays with different shapes such as square, diamond, and nanobar were created with high yield over large area, and localized surface plasmon spectra of those particle arrays were measured. Pattern linewidth was reduced to 50 nm in metal grating by depositing metals on the poly(dimethysiloxane) grating sidewall using a shadow evaporation process.

[1]  Carlos Pina-Hernandez,et al.  High‐Throughput and Etch‐Selective Nanoimprinting and Stamping Based on Fast‐ Thermal‐Curing Poly(dimethylsiloxane)s , 2007 .

[2]  Z. Suo,et al.  Stretchability of thin metal films on elastomer substrates , 2004 .

[3]  J. Rogers,et al.  Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics , 2002 .

[4]  L. J. Guo,et al.  Nanoimprint Lithography: Methods and Material Requirements , 2007 .

[5]  George M. Whitesides,et al.  A Selective Etching Solution for Use with Patterned Self-Assembled Monolayers of Alkanethiolates on Gold , 1995 .

[6]  L. Jay Guo,et al.  Nanoimprinted Semitransparent Metal Electrodes and Their Application in Organic Light‐Emitting Diodes , 2007 .

[7]  Jin Sung Kim,et al.  Nanoimprint Lithography Based Approach for the Fabrication of Large‐Area, Uniformly‐Oriented Plasmonic Arrays , 2008 .

[8]  L. Guo,et al.  High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates , 2008 .

[9]  George M. Whitesides,et al.  Patterning Self-Assembled Monolayers: Applications in Materials Science , 1994 .

[10]  John A. Rogers,et al.  Nanotransfer printing by use of noncovalent surface forces: Applications to thin-film transistors that use single-walled carbon nanotube networks and semiconducting polymers , 2004 .

[11]  L. Jay Guo,et al.  Semitransparent Cu electrode on a flexible substrate and its application in organic light emitting diodes , 2007 .