Integrated Micro-Optics

Microelectromechanical systems (MEMS), as the name suggests, are predisposed to the use of electrons and mechanical movement. By adding optics to the palette of MEMS capabilities, the resultant micro-opto-electromechanical systems (MOEMS) or micro-opto-mechanical systems (MOMS) provide increased functionality while retaining the attractive features of MEMS technology. As the spectrum of potential applications can thus be substantially increased, research and development work on optical MEMS has recently seen considerable activity.[1,2]

[1]  H. Porte,et al.  Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor , 1999 .

[2]  H. Zappe.  Introduction to Semiconductor Integrated Optics , 1995 .

[3]  Jeff Hecht,et al.  Understanding Fiber Optics , 1987 .

[4]  Hans Zappe.  Semiconductor Optical Sensors , 1999 .

[5]  P. Doussiere,et al.  High-performance semiconductor optical amplifier array for self-aligned packaging using Si V-groove flip-chip technique , 1995, IEEE Photonics Technology Letters.

[6]  허건수,et al.  DLP(Digital Light Processing) , 2001 .

[7]  Daniel Pircalaboiu,et al.  Optical integrated circuits , 1998, ROMOPTO International Conference on Micro- to Nano- Photonics III.

[8]  A. Kohl,et al.  Low-loss fibre-chip coupling by buried laterally tapered InP/InGaAsP waveguide structure , 1992 .

[9]  M. Fukuda.  Optical Semiconductor Devices , 1998 .

[10]  Toshikazu Hashimoto,et al.  Multichip optical hybrid integration technique with planar lightwave circuit platform , 1998 .

[11]  Jeff Hecht.  The laser guidebook (2nd ed.) , 1992 .

[12]  Larry J. Hornbeck.  Digital Light Processing and MEMS: reflecting the digital display needs of the networked society , 1996, Other Conferences.

[13]  H. Kogelnik.  Theory of Optical Waveguides , 1988 .

[14]  Ronald W. Waynant,et al.  Electro-Optics Handbook , 1994 .

[15]  E.C.M. Pennings,et al.  Optical multi-mode interference devices based on self-imaging: principles and applications , 1995 .

[16]  J. Hecht,et al.  The Laser Guidebook , 1986 .

[17]  H. Herzig.  Micro-Optics : Elements, Systems And Applications , 1997 .

[18]  R. G. Walker,et al.  Simple and accurate loss measurement technique for semiconductor optical waveguides , 1985 .

[19]  Siegfried Bauer,et al.  Poled polymers for sensors and photonic applications , 1996 .

[20]  Hans Zappe,et al.  Monolithically integrated optical interferometer for refractometry , 1997 .

[21]  M. Teich,et al.  Fundamentals of Photonics , 1991 .

[22]  J. Hecht,et al.  All-optical networks need optical switches , 2000 .

[23]  Silvano Donati,et al.  Photodetectors: Devices, Circuits and Applications , 1999 .

[24]  Ming C. Wu,et al.  Micromachining for optical and optoelectronic systems , 1997, Proc. IEEE.

[25]  Robert G. Hunsperger,et al.  Integrated optics, theory and technology , 1982 .

[26]  D.T. Neilson,et al.  Scalable micro mechanical optical crossconnects , 2000, LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080).

[27]  R. Muller,et al.  Optoelectronic packaging using silicon surface-micromachined alignment mirrors , 1995, IEEE Photonics Technology Letters.

[28]  H. Nishihara.  Optical integrated circuits , 1989 .

[29]  U. Koren,et al.  Tapered waveguide InGaAs/InGaAsP multiple-quantum-well lasers , 1990, IEEE Photonics Technology Letters.

[30]  Daniel Hofstetter,et al.  Optical displacement measurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers , 1997 .

[31]  Y. Uenishi,et al.  Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining , 1994 .

[32]  R. Alferness,et al.  Guided-wave optoelectronics , 1988 .

[33]  Emil Wolf,et al.  Principles of Optics: Contents , 1999 .

[34]  T. Miya,et al.  Silica-based planar lightwave circuits , 1998 .

[35]  Glenn Beheim,et al.  Modern trends in microstructures and integrated optics for communication, sensing, and actuation , 1997 .