论文信息 - Multiscale Simulations of Plasma Etching in Silicon Carbide Structures - 字舞流文

Multiscale Simulations of Plasma Etching in Silicon Carbide Structures

Daniel M. Pagano | S. Scalese | I. Deretzis | A. La Magna | P. Vasquez | M. Italia | Alfio Nastasi | Massimo D Pirnaci | Dario Tenaglia