论文信息 - Trade-offs in Temperature Control of Fast-Ramp RTO and RTA Systems †

Trade-offs in Temperature Control of Fast-Ramp RTO and RTA Systems †

Trade-offs in temperature control of fast-ramp RTP systems from an open-loop-input point of view are investigated, i.e., for a given desired temperature recipe a set of lamp command profiles is determined such that the resulting set of measured temperatures approaches the desired recipe as closely as possible. Exact tracking of fast-ramp recipes with rates such as 250 C/sec is usually not possible if other performance constraints, such as actuator saturation and/or small temperature overshoot, also have to be met. We investigated these trade-offs for a simulation model of a generic RTP system, both for fast-ramp oxidation (RTO) and fast-ramp spike anneal (RTA) processes .

DICK DE ROOVER | ABBAS EMAMI-NAEINI | JON L. EBERT

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