PID controller tuning by frequency loop-shaping: application to diffusion furnace temperature control

A frequency loop-shaping technique for tuning proportional-integral-derivative controllers is applied to temperature control of a three-zone industrial diffusion furnace used in semiconductor manufacturing. In this tuning method the controller parameters are tuned so as to minimize the difference between the actual and a target loop transfer function, in an /spl Lscr//sub /spl infin// sense. The problem is formulated in the frequency domain as a convex optimization which can be solved numerically in a reliable way. This method, combined with a system identification step, has produced very satisfactory controllers for the furnace temperature control application.

[1]  Liuping Wang,et al.  New frequency-domain design method for PID controllers , 1995 .

[2]  K. S. Tsakalis,et al.  Integrated identification and control for diffusion/CVD furnaces , 1997, 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97.

[3]  K. Tsakalis,et al.  PID controller tuning by frequency loop-shaping , 1996, Proceedings of 35th IEEE Conference on Decision and Control.

[4]  Daniel E. Rivera,et al.  Digital PID controller tuning using prefiltered ARX estimation , 1992, [1992] Proceedings of the 31st IEEE Conference on Decision and Control.

[5]  Lennart Ljung,et al.  System Identification: Theory for the User , 1987 .

[6]  Yoshikazu Nishikawa,et al.  A method for auto-tuning of PID control parameters , 1981, Autom..

[7]  Alfredo C. Desages,et al.  AUTOMATIC TUNING OF PID CONTROLLERS THROUGH RESPONSE OPTIMIZATION OVER A FINITE TIME HORIZON , 1989 .

[8]  Karl Johan Åström,et al.  PID Controllers: Theory, Design, and Tuning , 1995 .

[9]  M. Safonov.  Stability margins of diagonally perturbed multivariable feedback systems , 1982 .

[10]  L. Wang,et al.  A Frequency Domain Design Method for PID Controllers , 1993, 1993 American Control Conference.

[11]  C. A. Desoer,et al.  Nonlinear Systems Analysis , 1978 .

[12]  Michael J. Grimble,et al.  H∞ Controllers With a PID Structure , 1990 .

[13]  S. L. Harris,et al.  Controller tuning using optimization to meet multiple closed‐loop criteria , 1985 .

[14]  Ing-Rong Horng,et al.  Digital PID controller design via general discrete orthogonal polynomials , 1988 .

[15]  Ioan Doré Landau,et al.  A method for the auto-calibration of PID controllers , 1995, Autom..

[16]  Tor Steinar Schei,et al.  Automatic tuning of PID controllers based on transfer function estimation , 1994, Autom..

[17]  Stephen P. Boyd,et al.  Linear controller design: limits of performance , 1991 .

[18]  J. Si,et al.  Monitoring and control of semiconductor manufacturing processes , 1998 .