Combinatorial Techniques to Efficiently Investigate and Optimize Organic Thin Film Processing and Properties

In this article we present several developed and improved combinatorial techniques to optimize processing conditions and material properties of organic thin films. The combinatorial approach allows investigations of multi-variable dependencies and is the perfect tool to investigate organic thin films regarding their high performance purposes. In this context we develop and establish the reliable preparation of gradients of material composition, temperature, exposure, and immersion time. Furthermore we demonstrate the smart application of combinations of composition and processing gradients to create combinatorial libraries. First a binary combinatorial library is created by applying two gradients perpendicular to each other. A third gradient is carried out in very small areas and arranged matrix-like over the entire binary combinatorial library resulting in a ternary combinatorial library. Ternary combinatorial libraries allow identifying precise trends for the optimization of multi-variable dependent processes which is demonstrated on the lithographic patterning process. Here we verify conclusively the strong interaction and thus the interdependency of variables in the preparation and properties of complex organic thin film systems. The established gradient preparation techniques are not limited to lithographic patterning. It is possible to utilize and transfer the reported combinatorial techniques to other multi-variable dependent processes and to investigate and optimize thin film layers and devices for optical, electro-optical, and electronic applications.

[1]  Jandeleit,et al.  Combinatorial Materials Science and Catalysis. , 1999, Angewandte Chemie.

[2]  Hans-Werner Schmidt,et al.  Combinatorial preparation and characterization of thin-film multilayer electro-optical devices. , 2007, The Review of scientific instruments.

[3]  Krishna Rajan,et al.  Combinatorial and high-throughput screening of materials libraries: review of state of the art. , 2011, ACS combinatorial science.

[4]  Thomas H. Epps,et al.  Generating thickness gradients of thin polymer films via flow coating , 2006 .

[5]  J. Drews.  Drug discovery: a historical perspective. , 2000, Science.

[6]  Craig W Lindsley,et al.  Application of combinatorial chemistry science on modern drug discovery. , 2008, Journal of combinatorial chemistry.

[7]  D. Newman,et al.  Natural products as sources of new drugs over the last 25 years. , 2007, Journal of natural products.

[8]  Hans-Werner Schmidt,et al.  Combinatorial Optimization of a Molecular Glass Photoresist System for Electron Beam Lithography , 2011, Advanced materials.

[9]  Junyan Dai,et al.  Molecular Glass Resists for High-Resolution Patterning , 2006 .

[10]  Takehisa Matsuda,et al.  Cellular responses on a wettability gradient surface with continuous variations in surface compositions of carbonate and hydroxyl groups , 1995 .

[11]  C. Ober,et al.  Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists , 2012, Advanced materials.

[12]  William L Jorgensen,et al.  Efficient drug lead discovery and optimization. , 2009, Accounts of chemical research.

[13]  G. Sauerbrey,et al.  The use of quarts oscillators for weighing thin layers and for microweighing , 1959 .

[14]  Jonathan A. Ellman,et al.  Synthesis and Applications of Small Molecule Libraries. , 1996, Chemical reviews.

[15]  Hiroshi Tomiyasu,et al.  Design of high-performance chemically amplified resist , 1996, Advanced Lithography.

[16]  M. Blamire,et al.  High throughput thin film materials science , 2008 .

[17]  Nelson Felix,et al.  Physical Vapor Deposition of Molecular Glass Photoresists: A New Route to Chemically Amplified Patterning , 2007 .

[18]  M. Stamm,et al.  Tuning of surface properties of thin polymer films by electron beam treatment , 2009 .

[19]  G. Sauerbrey,et al.  Use of quartz vibration for weighing thin films on a microbalance , 1959 .

[20]  M. R. Rao,et al.  Combinatorial Optimization , 1992, NATO ASI Series.

[21]  A. Ludwig,et al.  Preparation of 24 ternary thin film materials libraries on a single substrate in one experiment for irreversible high-throughput studies. , 2012, ACS combinatorial science.

[22]  Eric J. Amis,et al.  Combinatorial Materials Science for Polymer Thin-Film Dewetting , 2000 .

[23]  Eric J. Amis,et al.  High-Throughput Measurement of Polymer Blend Phase Behavior , 2000 .

[24]  G. Sauerbrey.  Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung , 1959 .

[25]  W. Maier,et al.  Combinatorial and high-throughput materials science. , 2007, Angewandte Chemie.

[26]  Nelson Felix,et al.  Molecular Glass Resists as High‐Resolution Patterning Materials , 2008 .

[27]  C. Soles,et al.  Combinatorial methodologies offer potential for rapid research of photoresist materials and formulations , 2002 .

[28]  William J. Cook,et al.  Combinatorial optimization , 1997 .

[29]  Thuc H. Dam,et al.  PAB and PEB temperature gradient methodology for CAR optimization , 2006, SPIE Photomask Technology.

[30]  Hiroshi Ito.  Chemical amplification resists: Inception, implementation in device manufacture, and new developments , 2003 .

[31]  W. M. Haynes.  CRC Handbook of Chemistry and Physics , 1990 .

[32]  Matthias Boehm,et al.  Tailored star-shaped statistical teroligomers via ATRP for lithographic applications , 2012 .