Calculation of x-ray fluorescence intensities from bulk and multilayer samples

Equations are derived for the calculation of x-ray fluorescence intensities from bulk and multilayer samples. Both intra- and interlayer secondary fluorescence intensities are expressed analytically, in terms of the exponential-integral function. It is shown that calculations are performed much faster with this method than with a previous method using numerical integration. As an illustration, some examples of intensity calculations are given for a thin layer on a substrate.

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