论文信息 - On-Machine Optical Surface Profile Measuring System for Nano-Machining - 字舞流文

On-Machine Optical Surface Profile Measuring System for Nano-Machining

Kimiyuki Mitsui | Hayato Yoshioka | Hidenori Shinno | Hiroshi Sawano | Motohiro Takahashi | Motohiro Takahashi

[1] Kimiyuki Mitsui,et al. Development Of A High Resolution Sensor For Surface Roughness , 1988 .

[2] Hayato Yoshioka,et al. A Newly Developed Long-Stroke Vertical Nano-Motion Platform with Gravity Compensator , 2008 .

[3] Hayato Yoshioka,et al. A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining , 2007 .

[4] Sangkee Min,et al. Recent Advances in Mechanical Micromachining , 2006 .

[5] Cho Jui Tay,et al. In situ surface roughness measurement using a laser scattering method , 2003 .

[6] Toshimichi Moriwaki,et al. Ultraprecision Metal Cutting — The Past, the Present and the Future , 1991 .

[7] Hayato Yoshioka,et al. A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges , 2010 .

[8] K. Mitsui. In-proces sensors for surface roughness and their applications , 1986 .

[9] Guoxiong Zhang,et al. A Study on the Abbe Principle and Abbe Error , 1989 .