Highly-sensitive and high-resolution all-fiber three-dimensional measurement system.

A practical all-fiber three-dimensional measurement system is demonstrated with an incoherent interferometer at the eye-safe wavelength of 1.55 mum. The sensitivity and axial resolution are as high as 102 dB and 1.4 mum from a few meters' distance, respectively. A rotating scanner is developed for axial scanning, and a wide longitudinal scanning range of 54 mm is demonstrated. The high resolution images of a few samples are clearly obtained at the speed of 52 points/s. Moreover, the resolution, sensitivity, speed, and angle dependence are discussed for measurement of a 100 yen Japanese coin.

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