Compact 90° trench-based splitter for silicon-on-insulator rib waveguides

Compact silicon-on-insulator (SOI) rib waveguide 90° splitters based on narrow, high-aspect ratio (~10:1) trenches are designed and experimentally demonstrated. The splitter area is only 11 µm×11 µm. Splitter optical performance is investigated as a function of both trench width and refractive index of the trench fill material. We examine three trench fill materials, air (n=1.0), SU8 (n=1.57), and index matching fluid (n=1.733), and find good agreement between experimental measurement and three dimensional (3D) finite difference time domain (FDTD) simulation. A splitting ratio of 49/51 (reflection/transmission) is measured for an index fluid-filled trench 82nm wide.

[1]  G. Nordin,et al.  Compact and low loss silicon-on-insulator rib waveguide 90° bend , 2006 .

[2]  Jianhua Jiang,et al.  Small-area bends and beamsplitters for lowindex-contrast waveguides. , 2003, Optics express.

[3]  Gregory P. Nordin,et al.  In-plane photonic transduction for microcantilever sensor arrays , 2007, SPIE BiOS.

[4]  D. Mendlovic,et al.  Analysis of waveguide-splitter-junction in high-index Silicon-On-Insulator waveguides. , 2005, Optics express.

[5]  P. Dumon,et al.  Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology , 2005, Journal of Lightwave Technology.

[6]  Jean-Pierre Berenger,et al.  A perfectly matched layer for the absorption of electromagnetic waves , 1994 .

[7]  Ivo Rendina,et al.  Advances in silicon-on-insulator optoelectronics , 1998 .

[8]  Eric Cassan,et al.  Ultracompact splitter for submicrometer silicon-on-insulator rib waveguides. , 2004, Journal of the Optical Society of America. A, Optics, image science, and vision.

[9]  Y. Vlasov,et al.  Losses in single-mode silicon-on-insulator strip waveguides and bends. , 2004, Optics express.

[10]  Jinzhong Yu,et al.  Integrated folding 4/spl times/4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching , 2005 .

[11]  R Orobtchouk,et al.  Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors. , 2003, Optics letters.

[12]  Likarn Wang,et al.  Design for beam splitting components employing silicon-on-insulator rib waveguide structures. , 2005, Optics letters.

[13]  Wenhui Wang,et al.  Fabrication of integrated waveguide turning mirror on silicon-on-insulator , 2004, First IEEE International Conference on Group IV Photonics, 2004..