Interferometry within a resonant cavity with standing wave detection

We present a measuring technique for displacement and position sensing over a limited range with detection of standingwave pattern inside of a passive Fabry-Perot cavity. The concept considers locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Sensing of the interference maxima and minima within the cavity along the beam axis has been tested and proven with a low loss photoresistive photodetector based on a thin polycrystalline silicon layer.

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