Analytical Thermo-electric Model of Uncooled Microbolometer

Modelling of Microelectromechanical systems (MEMS) is a field of active research. An analytical model of a MEMS device allows significantly reducing the design time because simulating such a model is much faster than Finite Element Method (FEM) simulation. The main idea presented in this paper is the analytical thermo-electric model of uncooled microbolometer. It is shown that the model gives ac curate results for a wide range of geometric parameters and material properties.