Ferroelectric thin films prepared by sol-gel processing

Abstract Ferroelectric thin films are playing a growing role as key elements in variety of devices. For various techniques of ferroelectric thin film preparation, the sol-gel processing is one of the most promising. In comparison with different deposition techniques, we survey the intrinsic advantages and the recent improvements of the sol-gel processing. In this review paper, several interesting topics, including epitaxial growth and grain-orientation, symmetric and asymmetric P-E hysteresis loops, heterojunction effect of the interface between film and substrate, to attest pyroelectricity of the films, electrooptic coefficients in poled and unpoled films, possibility of amorphous ferroelectrics, etc., are introduced.

[1]  A. Glass,et al.  Study of Piezoelectric Oscillations in Wideband Pyroelectric LiTaO3 Detectors , 1970 .

[2]  P. Townsend,et al.  Sputter deposition of LiNbO3 films , 1986 .

[3]  T. Minami,et al.  Preparation of PbZrO3–PbTiO3 Ferroelectric Thin Films by the Sol–Gel Process , 1991 .

[4]  John D. Mackenzie,et al.  The self‐biased heterojunction effect of ferroelectric thin film on silicon substrate , 1990 .

[5]  Insulation Division,et al.  Thin film dielectrics , 1969 .

[6]  N. F. Foster The Deposition and Piezoelectric Characteristics of Sputtered Lithium Niobate Films , 1969 .

[7]  R. Castellano,et al.  Ion‐beam deposition of thin films of ferroelectric lead zirconate titanate (PZT) , 1979 .

[8]  S. Swartz,et al.  Ferroelectric Thin Films by sol-gel Processing , 1989 .

[9]  S. Desu,et al.  Effect of Thermal Processing Conditions on Ferroelectric PZT Thin Films , 1990 .

[10]  D. Partlow,et al.  Properties and microstructure of thin LiNbO_3 films prepared by a sol-gel process , 1987 .

[11]  Tsuneo Mitsuyu,et al.  Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rf-planar magnetron sputtering , 1986 .

[12]  C. B. Sawyer,et al.  Rochelle Salt as a Dielectric , 1930 .

[13]  M. Sayer,et al.  rf planar magnetron sputtering and characterization of ferroelectric Pb(Zr,Ti)O3 films , 1983 .

[14]  Y. Tomita,et al.  Preparation and characteristics of pyroelectric infrared sensors made of c‐axis oriented La‐modified PbTi03 thin films , 1987 .

[15]  D. W. Chapman Some Thin‐Film Properties of a New Ferroelectric Composition , 1969 .

[16]  T. Shrout,et al.  Sol-gel processing of composite PbTiO3/PLZT thin films , 1990 .

[17]  K. Budd,et al.  Thin-film ferroelectrics of PZT of sol-gel processing , 1988, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[18]  J. Cuomo,et al.  Ferroelectric Film Synthesis, Past and Present: A Select Review , 1990 .

[19]  T. Shrout,et al.  Characterization of MOCVD PbTiO3 thin films , 1989 .

[20]  M. Okuyama,et al.  Preparation of Oriented PbTiO3 Ferroelectric Thin Films on Silicon , 1985 .

[21]  K. Wasa,et al.  High Dielectric Constant Films of Amorphous LiNbO3 Prepared by Sputtering Deposition , 1981 .

[22]  S. Hirano,et al.  Formation of LiNbO3 films by hydrolysis of metal alkoxides , 1988 .

[23]  Scott R. Wilson,et al.  Crystal structure of lithium niobium ethoxide (LiNb(OCH2CH3)6: a precursor for lithium niobate ceramics , 1990 .

[24]  Hideaki Adachi,et al.  Electro‐optic effects of (Pb, La)(Zr, Ti)O3 thin films prepared by rf planar magnetron sputtering , 1983 .

[25]  Gérard Destefanis,et al.  The formation of waveguides and modulators in LiNbO3 by ion implantation , 1979 .

[26]  D. Ulrich Better Ceramics Through Chemistry , 1988 .

[27]  N. Kraemer,et al.  Ferroelectric-like behaviour observed in amorphous LiNbO3:fe by means of mossbauer spectroscopy , 1989 .

[28]  R. R. Mehta Some theoretical considerations relating to switching and remanence in ferroelectric/photoconductor memory devices , 1972 .

[29]  R. Zuleeg,et al.  Integrated sol-gel PZT thin-films on Pt, Si, and GaAs for non-volatile memory applications , 1990 .

[30]  S. Miyazawa Growth of LiNbO3 single‐crystal film for optical waveguides , 1973 .

[31]  Ching Jih Chen,et al.  Ferroelectric and pyroelectric properties of strontium barium niobate films prepared by the sol‐gel method , 1991 .

[32]  M. Kitabatake,et al.  Structure and electrical properties of amorphous PbTiO3 thin films sputtered on cooled substrates , 1982 .

[33]  A. Ballman,et al.  The growth of LiNbO3 thin films by liquid phase epitaxial techniques , 1975 .

[34]  D. J. Coleman,et al.  Effects of Hydrolysis On Metallo-Organic Solution Deposition of PZT FILMS , 1986 .

[35]  Ching Jih Chen,et al.  Sol-gel derived ferroelectric PZT thin films on doped silicon substrates , 1990 .

[36]  M. H. Francombe,et al.  Domain Structure and Polarization Reversal in Films of Ferroelectric Bismuth Titanate , 1972, IEEE Transactions on Sonics and Ultrasonics.

[37]  S. Hirano,et al.  Processing of Crystalline Li(Nb, Ta)O 3 Films with Preferred Orientation Through Metal Alkoxides , 1989 .

[38]  M. Lines Microscopic model for a ferroelectric glass , 1977 .

[39]  R. Vest,et al.  Preparation and properties of PLZT films from metallo-organic precursors , 1989 .

[40]  S. Sakamoto,et al.  Anomalous electro‐optic properties of ferroelectric strontium barium niobate and their device applications , 1973 .

[41]  Ching Jih Chen,et al.  Sol-gel processing of strontium-barium niobate ferroelectric thin film , 1990 .

[42]  Michael Sayer,et al.  Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties , 1988 .

[43]  K. Nassau,et al.  Anomalous dielectric behavior and reversible pyroelectricity in roller‐quenched LiNbO3 and LiTaO3 glass , 1977 .

[44]  Y. Venevtsev,et al.  Ferroelectric vacuum deposits of complex oxide type structure , 1974 .

[45]  D. W. Chapman Thin Film Ferroelectric Photoconductor Memory Device , 1972 .

[46]  S. Hirano,et al.  Synthesis of LiNbO sub 3 by hydrolysis of metal alkoxides , 1987 .

[47]  A. Mansingh Fabrication and applications of piezo-and ferroelectric films , 1990 .

[48]  Michael Sayer,et al.  Characterization of Pb(Zr,Ti)O3 thin films deposited from multielement metal targets , 1988 .

[49]  C. Araujo,et al.  Switching kinetics of lead zirconate titanate sub-micron thin-film memories , 1989 .

[50]  J. Mackenzie,et al.  Preparation and properties of KNbO3 via the sol-gel method , 1990 .

[51]  S. Hirano,et al.  Preparation of crystalline LiNbxTa1−xO3 (0≤x≤1) films from metal alkoxide solutions , 1989 .

[52]  K. Iijima,et al.  Dielectric and Pyroelectric Properties of PbTiO3 Thin Film , 1985 .

[53]  John D. Mackenzie,et al.  Glasses from melts and glasses from gels, a comparison , 1982 .

[54]  S. Hirano,et al.  Processing of crystalline LiNbO3 films with preferred orientation through an organometallic route , 1989 .

[55]  Donald R. Ulrich,et al.  Ultrastructure processing of advanced ceramics , 1988 .

[56]  Shu-Yau Wu,et al.  A new ferroelectric memory device, metal-ferroelectric-semiconductor transistor , 1974 .

[57]  A. M. Glass,et al.  Investigation of the Electrical Properties of Sr1−xBaxNb2O6 with Special Reference to Pyroelectric Detection , 1969 .

[58]  K. Etzold,et al.  Crystallization of sol-gel derived lead zirconate titanate thin films , 1991 .

[59]  R. Vest Metallo-organic decomposition (MOD) processing of ferroelectric and electro-optic films : a review , 1990 .

[60]  K. Iijima,et al.  Preparation of ferroelectric BaTiO3 thin films by activated reactive evaporation , 1990 .

[61]  M. Kitabatake,et al.  Structure and dielectric properties of amorphous LiNbO3 thin films prepared by a sputtering deposition , 1984 .

[62]  R. Whatmore,et al.  The growth of ferroelectric oxides by MOCVD , 1989 .

[63]  H. Beerman Improvement in the pyroelectric infrared radiation detector , 1971 .