CCD Imagers for Broadcast Aplplications (Invited Paper)
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A 2/3” FrameTransfer-CCD with 600k pixels for the NTSC standard is reported. Layout of the light sensitive part is based on a single-gate repetition structure. By this the image format is switchable in the vertical direction between standard (4:3) and widescreen (16:9) aspect ratios, while maintaining full vertical and horizontal resolution at a constant pixel rate. With the flexible clocking possibility inherent in FT-CCDs, a tunable vertical anti-aliasing filter is built on-chip. the doping profile and gate structure led to a dynamic range as high as 84 dB without compromizing other performance parameters. Layout of the CCD is based on a new design approach. The light sensitive part is composed by repeating a single gate electrode structure, as shown in Fig. 1. It uses membrane poly-Si [3] for high sensitivity (especially for blue light), and a profiled p-well for both antiblooming protection to 10,000 times overexposure and excellent saturation charge capacity of more than 160,000 e-/pixel.
[1] Groove-fill of tungsten and poly-Si membrane technology for high performance (HDTV) FT-CCD imagers , 1993, Proceedings of IEEE International Electron Devices Meeting.