Micro triple-hot-wire anemometer on small sized glass tube fabricated in 5DOF UV lithography system

This paper reports novel designed and fabricated micro airflow sensors based on the hot-wire sensing principle, i.e. gas cooling of electrically heated resistance. With three micro Ti/Pt hot-wire components with width of 50 μm and thickness of 130 nm fabricated on a glass tube (outer diameter of 2.8mm and inner diameter of 2.1mm) in five degrees of freedom (5DOF) UV lithography system with multi-layer alignment, the sensors on a cylindrical base have demonstrated high sensitivity, fast response time and ability to detect wind speed and direction. Environmental characterization of sensor at different levels of temperature, humidity and solar radiation has been carried out.