Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications

[1]  E. B. Magrab,et al.  Design and testing of a fast tool servo for diamond turning , 1985 .

[2]  이응숙,et al.  절ㆍ연삭에 의한 Micro Machining 기술 , 2000 .

[3]  R. Full,et al.  Adhesive force of a single gecko foot-hair , 2000, Nature.

[4]  Y. Yamagata,et al.  Ultraprecision Micro-Grinding of Germanium Immersion Grating Element for Mid-Infrared Super Dispersion Spectrograph , 2001 .

[5]  K. Sawada,et al.  Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving , 2002 .

[6]  Yuichi Okazaki,et al.  Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder , 2003 .

[7]  Fengzhou Fang,et al.  On minimum exit-burr in micro cutting , 2004 .

[8]  K. Autumn,et al.  Evidence for self-cleaning in gecko setae. , 2005, Proceedings of the National Academy of Sciences of the United States of America.

[9]  David L. Trumper,et al.  Ultrafast Tool Servos for Diamond Turning , 2005 .

[10]  A Y Yi,et al.  Design and fabrication of a microlens array by use of a slow tool servo. , 2005, Optics letters.

[11]  W. Sweatt,et al.  Diamond milling of micro-optics , 2006, 2006 IEEE Aerospace Conference.

[12]  Lei Jiang,et al.  The Dry‐Style Antifogging Properties of Mosquito Compound Eyes and Artificial Analogues Prepared by Soft Lithography , 2007 .

[13]  T. Moriwaki,et al.  Precision grinding of microarray lens molding die with 4-axes controlled microwheel , 2007 .

[14]  L. Biró,et al.  Living photonic crystals: Butterfly scales — Nanostructure and optical properties , 2007 .

[15]  Eun-Sang Lee,et al.  A study on optimum grinding factors for aspheric convex surface micro-lens using design of experiments , 2007 .

[16]  Lei Li,et al.  Fabrication of precision 3D microstructures by use of a combination of ultraprecision diamond turning and reactive ion etching process , 2007 .

[17]  Agostino G. Bruzzone,et al.  Advances in engineered surfaces for functional performance , 2008 .

[18]  Ekkard Brinksmeier,et al.  Manufacturing of molds for replication of micro cube corner retroreflectors , 2008, Prod. Eng..

[19]  Lei Li,et al.  Microfabrication on a curved surface using 3D microlens array projection , 2009 .

[20]  Yoshimi Takeuchi,et al.  6-Axis control ultraprecision microgrooving on sculptured surfaces with non-rotational cutting tool , 2006 .

[21]  F. Fang,et al.  Fabrication of micro DOE using micro tools shaped with focused ion beam. , 2010, Optics express.

[22]  Ekkard Brinksmeier,et al.  Ultra-precision grinding , 2010 .

[23]  Chi Fai Cheung,et al.  Characterization of surface generation of optical microstructures using a pattern and feature parametric analysis method , 2010 .

[24]  Yoshimi Takeuchi,et al.  Creation of V-shaped microgrooves with flat-ends by 6-axis control ultraprecision machining , 2010 .

[25]  Chi Fai Cheung,et al.  Analysis of surface generation in ultra-precision machining with a fast tool servo , 2010 .

[26]  Lei Li,et al.  Development of a 3D artificial compound eye. , 2010, Optics express.

[27]  M. Zhou,et al.  Study on Diamond Cutting of Nonrationally Symmetric Microstructured Surfaces with Fast Tool Servo , 2010 .

[28]  B. Bhushan,et al.  Shark-skin surfaces for fluid-drag reduction in turbulent flow: a review , 2010, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[29]  E. Brinksmeier,et al.  Submicron functional surfaces generated by diamond machining , 2010 .

[30]  Chi Fai Cheung,et al.  Modelling and simulation of structure surface generation using computer controlled ultra-precision polishing , 2011 .

[31]  Lei Jiang,et al.  Bio-inspired design of multiscale structures for function integration , 2011 .

[32]  A. Tünnermann,et al.  Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo. , 2011, Optics express.

[33]  A. Yi,et al.  Design and fabrication of a freeform microlens array for uniform beam shaping , 2011 .

[34]  J. Ritchie,et al.  Fabrication of periodic nanostructures by single-point diamond turning with focused ion beam built tool tips , 2012 .

[35]  Ekkard Brinksmeier,et al.  Review on diamond-machining processes for the generation of functional surface structures , 2012 .

[36]  Lei Li,et al.  Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera. , 2012, Applied optics.

[37]  Lei Xie,et al.  Replication of precise polymeric microlens arrays combining ultra-precision diamond ball-end milling and micro injection molding , 2012 .

[38]  Wei Gao,et al.  Precision tool setting for fabrication of a microstructure array , 2013 .

[39]  Lei Li,et al.  Fabrication of continuous diffractive optical elements using a fast tool servo diamond turning process , 2013 .

[40]  Y. Yamagata,et al.  Development of micro milling tool made of single crystalline diamond for ceramic cutting , 2013 .

[41]  C. Cheung,et al.  Modeling and characterization of generation of 3D micro-structured surfaces with self-cleaning and optical functions , 2013 .

[42]  Wenqiang Peng,et al.  A novel fabrication method for micro optical waveguide mold based on fly-cutting technology , 2013 .

[43]  E. Brinksmeier,et al.  Generation of discontinuous microstructures by Diamond Micro Chiseling , 2014 .

[44]  Samira Sayad Saravi,et al.  Design of serrate-semi-circular riblets with application to skin friction reduction on engineering surface , 2014 .

[45]  Mahmudur Rahman,et al.  A novel surface analytical model for cutting linearization error in fast tool/slow slide servo diamond turning , 2014 .

[46]  Jung Chul Lee,et al.  Precision evaluation of surface form error of a large-scale roll workpiece on a drum roll lathe , 2014 .

[47]  Wei Gao,et al.  A measurement method of cutting tool position for relay fabrication of microstructured surface , 2014 .

[48]  T. Kawanishi,et al.  Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method. , 2014, Optics express.

[49]  Xinquan Zhang,et al.  Roll-to-roll embossing of optical linear Fresnel lens polymer film for solar concentration. , 2014, Optics express.

[50]  Sandy To,et al.  Numerical and experimental analysis of heat transfer in turbulent flow channels with two-dimensional ribs , 2015 .

[51]  A. Senthil Kumar,et al.  An automated Guilloche machining technique for the fabrication of polygonal Fresnel lens array , 2015 .

[52]  Kui Liu,et al.  Diamond micro engraving of gravure roller mould for roll-to-roll printing of fine line electronics , 2015 .

[53]  Suet To,et al.  Theoretical and experimental investigation on the novel end-fly-cutting-servo diamond machining of hierarchical micro-nanostructures , 2015 .

[54]  S. To,et al.  A review of surface roughness generation in ultra-precision machining , 2015 .

[55]  Fengzhou Fang,et al.  Influence of machining errors on form errors of microlens arrays in ultra-precision turning , 2015 .

[56]  Suet To,et al.  Large-scale fabrication of micro-lens array by novel end-fly-cutting-servo diamond machining. , 2015, Optics express.

[57]  S. To,et al.  Amorphization and C segregation based surface generation of Reaction-Bonded SiC/Si composites under micro-grinding , 2015 .

[58]  B. Guo,et al.  On-machine dry electric discharge truing of diamond wheels for micro-structured surfaces grinding , 2015 .

[59]  Lili Jiang,et al.  High angular accuracy manufacture method of micro v-grooves based on tool alignment by on-machine measurement. , 2015, Optics express.

[60]  Suet To,et al.  Novel end-fly-cutting-servo system for deterministic generation of hierarchical micro-nanostructures , 2015 .

[61]  C. Cheung,et al.  Disparity pattern-based autostereoscopic 3D metrology system for in situ measurement of microstructured surfaces. , 2015, Optics letters.

[62]  Kui Liu,et al.  Ultra-precision machining of radial Fresnel lens on roller moulds , 2015 .

[63]  Suet To,et al.  A review of machine-tool vibration and its influence upon surface generation in ultra-precision machining , 2015 .

[64]  S. To,et al.  Active control of residual tool marks for freeform optics functionalization by novel biaxial servo assisted fly cutting. , 2015, Applied optics.

[65]  Wei Gao,et al.  An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor , 2015 .

[66]  Dragos Axinte,et al.  Textured grinding wheels: A review , 2016 .

[67]  S. To,et al.  A review of fly cutting applied to surface generation in ultra-precision machining , 2016 .

[68]  Deyuan Zhang,et al.  Continuous directional water transport on the peristome surface of Nepenthes alata , 2016, Nature.

[69]  Y. Liu,et al.  A novel evaluation and compensation method for ultra-precision machining of hybrid lens , 2016 .

[70]  Xiaoqin Zhou,et al.  High‐Throughput Generation of Hierarchical Micro/Nanostructures by Spatial Vibration‐Assisted Diamond Cutting , 2016 .

[71]  Kornel Ehmann,et al.  A novel diamond micro-/nano-machining process for the generation of hierarchical micro-/nano-structures , 2016 .

[72]  W. B. Lee,et al.  A study of cutting factors affecting the generation of functional hierarchical rib array structure in ultra-precision raster milling , 2016 .

[73]  Jianguo Zhang,et al.  Review of micro/nano machining by utilizing elliptical vibration cutting , 2016 .

[74]  Suet To,et al.  Virtual spindle based tool servo diamond turning of discontinuously structured microoptics arrays , 2016 .

[75]  Chi Fai Cheung,et al.  A theoretical and experimental investigation of orthogonal slow tool servo machining of wavy microstructured patterns on precision rollers , 2016 .

[76]  S. To,et al.  Wetting characteristics of bare micro-patterned cyclic olefin copolymer surfaces fabricated by ultra-precision raster milling , 2016 .

[77]  A. Kumar,et al.  Variation of surface generation mechanisms in ultra-precision machining due to relative tool sharpness (RTS) and material properties , 2017 .

[78]  Jiwang Yan,et al.  Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo , 2017 .

[79]  C. Cheung,et al.  A novel multi-jet polishing process and tool for high-efficiency polishing , 2017 .

[80]  Guoda Chen,et al.  Theoretical and experimental investigation of spindle axial drift and its effect on surface topography in ultra-precision diamond turning , 2017 .

[81]  Suet To,et al.  Design, Analysis, and Realization of a Novel Piezoelectrically Actuated Rotary Spatial Vibration System for Micro-/Nanomachining , 2017, IEEE/ASME Transactions on Mechatronics.

[82]  Kui Liu,et al.  Profile evaluation of radial Fresnel lens directly machined on roller molds by rotating-tool diamond turning , 2017 .

[83]  Sandy To,et al.  Diamond tool wear in ultra-precision machining , 2017 .

[84]  Peng Huang,et al.  Feasibility study of the novel quasi-elliptical tool servo for vibration suppression in the turning of micro-lens arrays , 2017 .

[85]  Kornel Ehmann,et al.  Investigation of hybrid micro-texture fabrication in elliptical vibration-assisted cutting , 2017 .

[86]  C. Cheung,et al.  Fluid jet-array parallel machining of optical microstructure array surfaces. , 2017, Optics express.

[87]  Kui Liu,et al.  Ultra-precision machining of grayscale pixelated micro images on metal surface , 2017 .

[88]  Erhan Budak,et al.  Multi-dimensional chatter stability for enhanced productivity in different parallel turning strategies , 2017 .

[89]  Siqin Pang,et al.  Burr formation mechanism of ultraprecision cutting for microgrooves on nickel phosphide in consideration of the diamond tool edge radius , 2018 .

[90]  S. To,et al.  A theoretical and experimental study of spindle imbalance induced forced vibration and its effect on surface generation in diamond turning , 2018, International Journal of Machine Tools and Manufacture.

[91]  S. To,et al.  Diamond turning of micro-lens array on the roller featuring high aspect ratio , 2018 .

[92]  A. Kumar,et al.  Rehbinder effect in ultraprecision machining of ductile materials , 2018, International Journal of Machine Tools and Manufacture.

[93]  T. Sun,et al.  An accurate 3D surface topography model for single-point diamond turning , 2018, International Journal of Machine Tools and Manufacture.

[94]  A. Kumar,et al.  Rotating-tool diamond turning of Fresnel lenses on a roller mold for manufacturing of functional optical film , 2018 .

[95]  F. Fang,et al.  Highly uniform manufacturing method for large-area microlens arrays , 2018 .

[96]  Yangmin Li,et al.  Optimum Design of a Piezo-Actuated Triaxial Compliant Mechanism for Nanocutting , 2018, IEEE Transactions on Industrial Electronics.

[97]  E. Brinksmeier,et al.  Material Impact on Diamond Machining of Diffractive Optical Structures for UV-Application , 2018 .

[98]  A. Kumar,et al.  High-efficiency swinging-rotating diamond shaping of Fresnel lenses on roller molds , 2018 .

[99]  Fengzhou Fang,et al.  Review on fast tool servo machining of optical freeform surfaces , 2018 .

[100]  S. To,et al.  A novel ductile machining model of single-crystal silicon for freeform surfaces with large azimuthal height variation by ultra-precision fly cutting , 2018, International Journal of Machine Tools and Manufacture.

[101]  Xiaodong Zhang,et al.  A new diamond machining approach for extendable fabrication of micro-freeform lens array , 2018 .

[102]  F. Fang,et al.  Diamond cutting of micro-structure array on brittle material assisted by multi-ion implantation , 2019, International Journal of Machine Tools and Manufacture.

[103]  Ping Guo,et al.  Global tool path optimization of high-resolution image reproduction in ultrasonic modulation cutting for structural coloration , 2019, International Journal of Machine Tools and Manufacture.

[104]  Xiaoqin Zhou,et al.  Cutting forces in fast-/slow tool servo diamond turning of micro-structured surfaces , 2019, International Journal of Machine Tools and Manufacture.

[105]  S. To,et al.  Modulated diamond cutting for the generation of complicated micro/nanofluidic channels , 2019, Precision Engineering.

[106]  Zhiwei Zhu,et al.  Design and Trajectory Tracking of a Nanometric Ultra-Fast Tool Servo , 2020, IEEE Transactions on Industrial Electronics.