论文信息 - Surface preparation for Schottky metal - 4H-SiC contacts formed on plasma-etched SiC - 字舞流文

Surface preparation for Schottky metal - 4H-SiC contacts formed on plasma-etched SiC

A. O'Neill | K. Hilton | M. Uren | P. Wilding | C. M. Johnson | N. Wright | A. Pidduck | D. Morrison | V. Moore