New approach for testing of aspherical micro-optics with high numerical aperture

The collimation of strongly diverging laser beams emitted by diode lasers is performed with aspherical micro-optical components. In order to obtain a good beam profile high- quality micro-lenses with a large numerical aperture compared to conventional lenses have to be applied. The characterization of these components using conventional interferometric techniques is not suitable, costly or inaccurate with respect to the required accuracy of the lens shape. In this paper Digital Holography as a measurement tool for the characterization of micro-optical components is presented, which has some advantageous properties with respect to other interferometric techniques. Results of the characterization of single cylindrical microlenses as well as microlens-arrays used for laser beam collimation and shaping are presented.

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