Novel contactless mode of electroreflectance

We report a new contactless mode of electroreflectance which utilizes a condenserlike system. One electrode consists of a transparent conductive coating on a transparent substrate which is separated from the sample surface by a thin layer of air. We have measured the contactless electroreflectance spectra at 300 K from a number of materials including semi‐insulating bulk GaAs, bulk narrow gap Hg0.8Cd0.2Te, a GaAs structure with a large, uniform electric field and a GaAs/Ga1−xAlxAs (x≊0.2) coupled double quantum well.

[1]  F. Pollak,et al.  Characterization of GaAs/Ga1−xAlxAs heterojunction bipolar transistor structures using photoreflectance , 1990 .

[2]  J. Woodall,et al.  Photoreflectance study of surface photovoltage effects at (100)GaAs surfaces/interfaces , 1991 .

[3]  P. M. Raccah,et al.  Electron beam electroreflectance studies of GaAs and CdTe surfaces , 1988 .

[4]  P. M. Amirtharaj,et al.  Excitation wavelength and pump chopping frequency dependence of photoreflectance in Hg1-xCdxTe , 1988 .

[5]  Fred H. Pollak,et al.  Modulation Spectroscopy As A Technique For Semiconductor Characterization , 1981, Advanced Lithography.

[6]  H. Shen,et al.  Photoreflectance characterization of semiconductors and semiconductor heterostructures , 1990 .

[7]  H. Shen,et al.  New normalization procedure for modulation spectroscopy , 1987 .

[8]  Fred H. Pollak,et al.  Modulation Spectroscopy Of Semiconductor Microstructures: An Overview , 1988, Other Conferences.

[9]  T. S. Moss,et al.  Handbook on semiconductors , 1980 .

[10]  James W. Garland,et al.  Comparative Study of Defects in Semiconductors by Electrolyte Electroreflectance and Spectroscopic Ellipsometry , 1984 .

[11]  M. Gal,et al.  Novel contactless electroreflectance spectroscopy of semiconductors , 1990 .

[12]  T. Kuech,et al.  Dependence of the AlxGa1−xAs band edge on alloy composition based on the absolute measurement of x , 1987 .

[13]  Michael H. Herman.  Discussion of modulation mechanisms in electron-beam electroreflectance and comparison to alternative modulation techniques , 1990, Other Conferences.