论文信息 - Stacked, standing wave detectors in 3D SOI-CMOS

Stacked, standing wave detectors in 3D SOI-CMOS

We report on the design of stacked standing wave detectors in a 3D SOI CMOS technology. The standing wave detector is the basic block needed to implement a die level CMOS interferometer to measure small displacements. The 3D CMOS process allows for standing wave detectors to be vertically stacked which provides directional information as well as displacement information from the interferometer. We discuss design considerations for the photodiodes and MOS amplifier

Andreas G. Andreou | Philippe O. Pouliquen | Francisco Tejada

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