A Reliability Model of Micro-Engines Subject to Natural Degradation and Dependent Zoned Shocks

Most Micro-Electro-Mechanical Systems (MEMS) experience natural degradation and random shocks simultaneously, and their failures are mainly the results of competing soft and hard failure processes. For some MEMS devices like micro-engines, considering that they have resistance against small shock loads, shocks can be categorized into three shock zones according to their magnitudes: safety zone, damage zone, and fatal zone. The fatal shocks can cause hard failure immediately, and the damage shocks can (i) increase the degradation level and (ii) reduce the hard failure threshold. In this paper, the effect (ii) is described by a dependence between the classifications of damage shocks and fatal shocks: after surviving a damage shock, the probability of a shock in fatal zone increases and in damage zone decreases. Due to the dependence, the Poisson process widely used in previous studies is unsuitable. A dependent zoned shock model is developed, where a Hindrance model, which is a special type of Markov point process, is first introduced to describe the damage shocks, and a Cox process is used to model the fatal shocks. Then, a general reliability model of micro-engines subject to degradation and dependent zoned shocks is developed. When the micro-engine degrades linearly, an analytical reliability model is derived. Finally, a numerical example is conducted to illustrate the effectiveness of the developed model.

[1]  Jeremy A. Walraven,et al.  MEMS reliability in shock environments , 2000, 2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059).

[2]  D. Cox Some Statistical Methods Connected with Series of Events , 1955 .

[3]  Khac Tuan Huynh,et al.  Modeling age-based maintenance strategies with minimal repairs for systems subject to competing failure modes due to degradation and shocks , 2012, Eur. J. Oper. Res..

[4]  Daoming Sun,et al.  Reliability modeling for systems subject to multiple dependent competing failure processes with shock loads above a certain level , 2017, Reliab. Eng. Syst. Saf..

[5]  Wei Dang,et al.  A Competing Risk Model of Reliability Analysis for NAND-Based SSDs in Space Application , 2019, IEEE Access.

[6]  Qianmei Feng,et al.  Reliability analysis of multiple-component series systems subject to hard and soft failures with dependent shock effects , 2016 .

[7]  Zhen He,et al.  Reliability modeling with condition-based maintenance for binary-state deteriorating systems considering zoned shock effects , 2019, Comput. Ind. Eng..

[8]  Yu Zhao,et al.  Reliability modeling for mutually dependent competing failure processes due to degradation and random shocks , 2017 .

[9]  J. Grandell Doubly stochastic Poisson processes , 1976 .

[10]  Di Cao,et al.  Adaptive Dynamic Surface Control of MEMS Gyroscope Sensor Using Fuzzy Compensator , 2016, IEEE Access.

[11]  Maxim Finkelstein,et al.  On preventive maintenance of systems with lifetimes dependent on a random shock process , 2017, Reliab. Eng. Syst. Saf..

[12]  David Vere-Jones,et al.  Point Processes , 2011, International Encyclopedia of Statistical Science.

[13]  Yaping Wang,et al.  Modeling the Dependent Competing Risks With Multiple Degradation Processes and Random Shock Using Time-Varying Copulas , 2012, IEEE Transactions on Reliability.

[14]  Yu Zhao,et al.  Hybrid preventive maintenance of competing failures under random environment , 2018, Reliab. Eng. Syst. Saf..

[15]  Wolfgang Kuehnel,et al.  A surface micromachined silicon accelerometer with on-chip detection circuitry , 1994 .

[16]  Qianmei Feng,et al.  Reliability modeling for dependent competing failure processes with changing degradation rate , 2014 .

[17]  J. M. Elliott,et al.  Some methods for the statistical analysis of samples of benthic invertebrates , 1971 .

[18]  David W. Coit,et al.  Reliability assessment of competing risks with generalized mixed shock models , 2017, Reliab. Eng. Syst. Saf..

[19]  David W. Coit,et al.  Reliability and maintenance modeling for systems subject to multiple dependent competing failure processes , 2010 .

[20]  Rui Peng,et al.  A preventive maintenance policy based on dependent two-stage deterioration and external shocks , 2017, Reliab. Eng. Syst. Saf..

[21]  Shixi Hou,et al.  Adaptive Neural Backstepping PID Global Sliding Mode Fuzzy Control of MEMS Gyroscope , 2019, IEEE Access.

[22]  Inmaculada Torres Castro,et al.  A condition-based maintenance of a dependent degradation-threshold-shock model in a system with multiple degradation processes , 2015, Reliab. Eng. Syst. Saf..

[23]  Jeremy A. Walraven,et al.  Failure analysis of worn surface-micromachined microengines , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[24]  Qianmei Feng,et al.  Modeling zoned shock effects on stochastic degradation in dependent failure processes , 2015 .

[25]  David W. Coit,et al.  Reliability for systems of degrading components with distinct component shock sets , 2014, Reliab. Eng. Syst. Saf..

[26]  Stephen F. Bart,et al.  Operational characteristics of microfabricated electric motors , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[27]  Enrico Zio,et al.  A Sequential Bayesian Approach for Remaining Useful Life Prediction of Dependent Competing Failure Processes , 2019, IEEE Transactions on Reliability.

[28]  Shengkui Zeng,et al.  Reliability Analysis of Load-Sharing Systems Subject to Dependent Degradation Processes and Random Shocks , 2017, IEEE Access.

[29]  D. M. Tanner,et al.  Frequency dependence of the lifetime of a surface micromachined microengine driving a load , 1999 .

[30]  Ying Chen,et al.  A Failure Mechanism Cumulative Model for Reliability Evaluation of a k-Out-of-n System With Load Sharing Effect , 2019, IEEE Access.

[31]  Paolo Di Barba,et al.  Evolutionary Computing and Optimal Design of MEMS , 2015, IEEE/ASME Transactions on Mechatronics.

[32]  Songhua Hao,et al.  Reliability analysis for dependent competing failure processes with changing degradation rate and hard failure threshold levels , 2018, Comput. Ind. Eng..

[33]  David W. Coit,et al.  Reliability Analysis for Multi-Component Systems Subject to Multiple Dependent Competing Failure Processes , 2014, IEEE Transactions on Reliability.

[34]  Guang Meng,et al.  Property Analysis of the Rough Slider Bearings in Micromotors for MEMS Applications , 2009, IEEE/ASME Transactions on Mechatronics.

[35]  D. M. Tanner,et al.  Wear Mechanisms in a Reliability Methodology , 2003, SPIE MOEMS-MEMS.

[36]  Enrico Zio,et al.  Modeling dependent competing failure processes with degradation-shock dependence , 2017, Reliab. Eng. Syst. Saf..

[37]  Leonidas Camarinopoulos,et al.  Dynamic reliability under random shocks , 2002, Reliab. Eng. Syst. Saf..

[38]  Inmaculada Torres Castro A model of imperfect preventive maintenance with dependent failure modes , 2009, Eur. J. Oper. Res..