Surface-micromachined microoptical elements and systems
暂无分享,去创建一个
[1] Yu-Chong Tai,et al. Integrated movable micromechanical structures for sensors and actuators , 1988 .
[2] William C. Tang,et al. Electrostatic-comb drive of lateral polysilicon resonators , 1990 .
[3] M. Wale. Self aligned, flip chip assembly of photonic devices with electrical and optical connections , 1990, 40th Conference Proceedings on Electronic Components and Technology.
[4] Mitchell S. Cohen,et al. Packaging of high-density fiber/laser modules using passive alignment techniques , 1992, 1992 Proceedings 42nd Electronic Components & Technology Conference.
[5] R. Howe,et al. Viscous damping model for laterally oscillating microstructures , 1994 .
[6] R. Muller,et al. Optoelectronic packaging using silicon surface-micromachined alignment mirrors , 1995, IEEE Photonics Technology Letters.
[7] F. Merat,et al. Diffraction grating scanners using polysilicon micromotors , 1995 .
[8] H. Fujita,et al. A quantitative analysis of Scratch Drive Actuator using buckling motion , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.
[9] Lih Y. Lin,et al. Micromachined free-space integrated micro-optics , 1995 .
[10] R. Muller,et al. Laser-to-fiber coupling module using a micromachined alignment mirror , 1995, IEEE Photonics Technology Letters.
[11] H. Fujita,et al. Electrostatic micro torsion mirrors for an optical switch matrix , 1996 .
[12] K. Lau. MEM's the word for optical beam manipulation , 1997 .
[13] R. Muller,et al. Surface-micromachined diffraction gratings for scanning spectroscopic applications , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[14] C. Chang-Hasnain,et al. Actuated polysilicon micromirrors for raster-scanning displays , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[15] Kam Y. Lau,et al. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning , 1998 .
[16] F. Merat,et al. THE DEVELOPMENT OF POLYSILICON MICROMOTORS FOR OPTICAL SCANNING APPLICATIONS , 1999 .