论文信息 - Optical scanning devices based on PZT thick films formed by aerosol deposition method

Optical scanning devices based on PZT thick films formed by aerosol deposition method

High-speed metal-based optical microscanning devices with low production cost and simple fabrication process wre successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package. The scanner is applicable to SVGA high-resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.

Harumichi Sato | Jae-Hyuk Park | Jun Akedo | Maxim Lebedev

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