Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array

Low-voltage and low-power design is the key issue for the portable electronics applications and has become the major concern for the system design. Integrated gas sensor array allows the monolithic realization of multi-species gas sensing systems. This paper reports the developments of Si-based micro-machined micro-heater array with extremely low-power consumption, low-voltage operation, and CMOS compatibility, and low-voltage and low-power CMOS drive circuitry for the micro-heaters that can provide large drive current and voltage swing, and heater temperature is continuously adjustable in the full temperature range.

[1]  K. Persaud,et al.  Analysis of discrimination mechanisms in the mammalian olfactory system using a model nose , 1982, Nature.

[2]  Johnny K. O. Sin,et al.  Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications , 1996 .

[3]  M. Gaitan,et al.  Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing , 1993, IEEE Electron Device Letters.

[4]  Fabrizio Davide,et al.  A composed neural network for the recognition of gas mixtures , 1995 .

[5]  Matteo Ferroni,et al.  Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure , 1998 .

[6]  John S. Suehle,et al.  Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplate gas sensors , 1996 .

[7]  J. Gardner.  Detection of vapours and odours from a multisensor array using pattern recognition Part 1. Principal component and cluster analysis , 1991 .

[8]  J. Gardner,et al.  Intelligent vapour discrimination using a composite 12-element sensor array , 1990 .

[9]  John A. Small,et al.  Growth of SnO2 films on micromachined hotplates , 1995 .

[10]  J. Stetter,et al.  Theoretical basis for identification and measurement of air contaminants using an array of sensors having partly overlapping selectivities , 1984 .

[11]  Carole Rossi,et al.  Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes , 1997 .

[12]  Johnny K. O. Sin,et al.  A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering , 1998 .

[13]  Wan-Young Chung,et al.  Fabrication of New Planar-Type Microsensor Attached with Spin-Coated Thin Film of Tin Dioxide and Its Thermal and CO Sensing Characteristics , 1998 .