Design, fabrication, characterization and packaging of bottom gate and nano-porous TiO2 based FET

Bottom gate field effect transistors (FETs) with nano-porous TiO2 as channel has been designed, fabricated, characterized and packaged. The fabrication process is simple, scalable and reproducible. Reactive RF sputtering and lift off process was used for depositing and patterning TiO2 respectively. TiO2 was annealed to tune its crystallinity from amorphous to anatase. Microscopy study of TiO2 film reveals nano-porous morphology which improves the surface properties and makes it useful for sensing applications. The transistor characteristics of FET show p-channel behavior and the device has been packaged onto headers for testing it in presence of analytes.

[1]  R. Sarpong,et al.  Bio-inspired synthesis of xishacorenes A, B, and C, and a new congener from fuscol† †Electronic supplementary information (ESI) available. See DOI: 10.1039/c9sc02572c , 2019, Chemical science.

[2]  Sudhir Chandra,et al.  Effect of TiO2 Functionalization on Nano-Porous Silicon for Selective Alcohol Sensing at Room Temperature , 2017 .

[3]  Samaresh Das,et al.  Synthesis of α-MoO3 nano-flakes by dry oxidation of RF sputtered Mo thin films and their application in gas sensing , 2016 .

[4]  B. Pietrzyk,et al.  Anatase–rutile transformation of TiO2 sol–gel coatings deposited on different substrates , 2015 .

[5]  Ester Segal,et al.  Label-free optical biosensors based on aptamer-functionalized porous silicon scaffolds. , 2015, Analytical chemistry.

[6]  Jian-Bai Xia,et al.  Photoresponsive and Gas Sensing Field-Effect Transistors based on Multilayer WS2 Nanoflakes , 2014, Scientific Reports.

[7]  R. Andrievski.  Review of thermal stability of nanomaterials , 2014, Journal of Materials Science.

[8]  Bo Xiao,et al.  Nanotechnology in diagnostics and therapeutics for gastrointestinal disorders. , 2013, Digestive and liver disease : official journal of the Italian Society of Gastroenterology and the Italian Association for the Study of the Liver.

[9]  Kangho Lee,et al.  High‐Performance Sensors Based on Molybdenum Disulfide Thin Films , 2013, Advanced materials.

[10]  Ying Zhu,et al.  Functionalised porous silicon as a biosensor: emphasis on monitoring cells in vivo and in vitro. , 2013, The Analyst.

[11]  O. Ersen,et al.  Experimental assessment of the phonon confinement in TiO2 anatase nanocrystallites by Raman spectroscopy , 2012 .

[12]  R. Chtourou,et al.  Annealing effects on microstructural and optical properties of Nanostructured-TiO2 thin films prepared by sol–gel technique , 2012 .

[13]  Sheikh A. Akbar,et al.  A selective room temperature formaldehyde gas sensor using TiO2 nanotube arrays , 2011 .

[14]  T. Roch,et al.  Hydrogen gas sensors based on nanocrystalline TiO2 thin films , 2011 .

[15]  Guojun Du,et al.  Enhancement of ethanol vapor sensing of TiO2 nanobelts by surface engineering. , 2010, ACS applied materials & interfaces.

[16]  Dong Xiang,et al.  Metal Oxide Gas Sensors: Sensitivity and Influencing Factors , 2010, Sensors.

[17]  Hongtao Wang,et al.  Stability and aggregation of metal oxide nanoparticles in natural aqueous matrices. , 2010, Environmental science & technology.

[18]  Adisorn Tuantranont,et al.  Characterization of n-type and p-type semiconductor gas sensors based on NiOx doped TiO2 thin films , 2009 .

[19]  K. Jain,et al.  Applications of nanobiotechnology in clinical diagnostics. , 2007, Clinical chemistry.

[20]  C. Ziegler,et al.  Structural investigation of pristine and annealed nanocrystalline TiO2 thin films by X-ray diffraction and Raman spectroscopy , 2007 .

[21]  S. Mukherjee,et al.  Applications in micro- and nanoelectromechanical systems , 2006 .

[22]  Hartmut Presting,et al.  Future nanotechnology developments for automotive applications , 2003 .

[23]  W. Hager,et al.  and s , 2019, Shallow Water Hydraulics.

[24]  S. Venkatachalapathy,et al.  Parametric study of pool boiling heat transfer with nanofluids for the enhancement of critical heat flux: A review , 2015 .

[25]  W. Marsden.  I and J , 2012 .

[26]  S. Choopun,et al.  Enhancement of Ethanol Sensing Properties by Impregnating Platinum on Surface of ZnO Tetrapods , 2010, IEEE Sensors Journal.