Parameter identification and hysteresis compensation of embedded piezoelectric stack actuators

Abstract A novel method for the identification of embedded piezoelectric stack actuator parameters in combination with a real-time capable hysteresis compensation measure is presented. The presented algorithms are based on the Maxwell resistive capacitor model and are particularly useful for the identification of piezoelectric actuators embedded in a high-precision micropositioning system where the disassembly of the complete system for separate actuator identification is not recommended or not possible. The parameter identification can be performed in a fully automated way and enables the adaptation of the compensation routine to the changed circumstances (temperature difference, wearing of actuators) as well. The hysteresis compensation method proposed here does not require significant CPU or memory resources. It can be implemented as an additional task on the already existing controller or a low-budget FPGA. As an example, the proposed method was validated experimentally by the parameter identification and hysteresis compensation of the piezoelectric actuators incorporated in a commercially available hybrid micropositioning system. The achieved experimental results are in very good agreement with the theoretical ones.