论文信息 - Compact grating coupler for thick silicon nitride

Compact grating coupler for thick silicon nitride

Thick Silicon nitride-on-insolater (SNOI) is widely used for nonlinear applications due to its broadband nearly-zero flattened dispersion. In this paper, we present a grating coupler for strip waveguides on 700-nm-thick SNOI. Focusing grating structure and inverse taper are combined to minify the footprint to 70μm × 19μm. The peak couplin g efficiency is -3.7dB and the 1-dB bandwidth is 54nm.

[1] Michal Lipson,et al. Harmonic generation in silicon nitride ring resonators. , 2010, Optics express.

[2] B. Lamontagne,et al. Single-etch grating coupler for micrometric silicon rib waveguides. , 2011, Optics letters.

[3] Hans Sohlström,et al. High efficiency silicon nitride surface grating couplers. , 2008, Optics express.

[4] Michal Lipson,et al. Chip-based frequency combs with sub-100 GHz repetition rates. , 2012, Optics letters.

[5] Young-Kai Chen,et al. Wide Bandwidth Silicon Nitride Grating Coupler , 2010, IEEE Photonics Technology Letters.

[6] C. Li,et al. High efficiency silicon nitride grating coupler , 2013, Applied Physics A.

[7] Siegfried Janz,et al. Waveguide grating coupler with subwavelength microstructures. , 2009, Optics letters.

[8] Chao Li,et al. Efficient silicon nitride grating coupler with distributed Bragg reflectors. , 2014, Optics express.

[9] Alejandro Ortega-Moñux,et al. Efficient fiber-to-chip grating coupler for micrometric SOI rib waveguides. , 2010, Optics express.

[10] M. Lipson,et al. Ultrabroadband supercontinuum generation in a CMOS-compatible platform. , 2012, Optics letters.

[11] Kazuhiro Ikeda,et al. Group velocity dispersion and self phase modulation in silicon nitride waveguides , 2010 .