A tunable polymer waveguide ring filter fabricated with UV-based soft imprint technique

Abstract Photonic integrated components with tunability, low power consumption and low fabrication cost are of considerable interest for optical communications and optical signal processing systems. Based on the high thermo-optic coefficient of polymer material, we demonstrate a tunable integrated waveguide ring filter with a novel but very simple UV-based soft imprint technique. By properly incorporating a Mach–Zencher interferometer (MZI), the tunability of the ring filter's coupling states and resonant wavelength are realized flexibly by the micro-heaters. The tuning efficiency of resonant wavelength is 8.2 pm/mW within one free spectrum range of the ring filter.

[1]  Otto Schwelb,et al.  A decade of progress in microring and microdisk based photonic circuits: a personal selection , 2008, SPIE LASE.

[2]  J. V. Galan,et al.  Single Bandpass Photonic Microwave Filter Based on a Notch Ring Resonator , 2010, IEEE Photonics Technology Letters.

[3]  G. Morthier,et al.  Quasi-single-sideband radio over fiber transmission with a polymer-based waveguide microring resonator , 2011 .

[4]  Hans Nørgaard Hansen,et al.  Experimental investigation of new manufacturing process chains to create micro-metal structures on polymer substrates for lab-on-chip sensors , 2012 .

[5]  Gun-Duk Kim,et al.  Photonic microwave reconfigurable filter based on a tunable polymeric ring resonator , 2007 .

[6]  S. Forrest,et al.  Control of quality factor and critical coupling in microring resonators through integration of a semiconductor optical amplifier , 2004, IEEE Photonics Technology Letters.

[7]  A. Yariv,et al.  Polymer microring coupled-resonator optical waveguides , 2006, Journal of Lightwave Technology.

[8]  Tong Zhang,et al.  Tunable Optical Ring Resonator Integrated With Asymmetric Mach–Zehnder Interferometer , 2010, Journal of Lightwave Technology.

[9]  L. J. Guo,et al.  Nanoimprint Lithography: Methods and Material Requirements , 2007 .

[10]  M.C. Wu,et al.  Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler , 2007, IEEE Journal of Selected Topics in Quantum Electronics.

[11]  A. Yariv.  Universal relations for coupling of optical power between microresonators and dielectric waveguides , 2000 .

[12]  L.J. Guo,et al.  Polymer microring resonators for biochemical sensing applications , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[13]  R V Penty,et al.  Regenerative polymeric bus architecture for board-level optical interconnects. , 2012, Optics express.

[14]  Yuze Sun,et al.  Sensitive optical biosensors for unlabeled targets: a review. , 2008, Analytica chimica acta.

[16]  Byoung-Joon Seo,et al.  Electrooptic Polymer Ring Resonator Modulation up to 165 GHz , 2007, IEEE Journal of Selected Topics in Quantum Electronics.

[17]  N. Xie,et al.  Very Low Power Operation of Compact MMI Polymer Thermooptic Switch , 2009, IEEE Photonics Technology Letters.

[18]  Geert Morthier,et al.  A PSQ-L Polymer Microring Resonator Fabricated by a Simple UV-Based Soft-Lithography Process , 2009 .

[19]  R. Norwood,et al.  Hybrid polymer/sol–gel waveguide modulators with exceptionally large electro–optic coefficients , 2007 .

[20]  Hongbo Zhang,et al.  Properties of liquid inorganic-organic hybrid polymer optical waveguide materials , 2008, SPIE/OSA/IEEE Asia Communications and Photonics.

[21]  Larry R. Dalton,et al.  Polymer-based optical waveguides: Materials, processing, and devices , 2002 .

[22]  Yuan Song,et al.  Synthesis of liquid polysilisiquioxane resins and properties of cured films , 2008 .

[23]  Sabarni Palit,et al.  Chip scale integrated microresonator sensing systems , 2009, Journal of biophotonics.