Fabrication and transfer of fragile 3D PDMS microstructures

We present a method for PDMS microfabrication of fragile membranes and 3D fluidic networks, using a surface modified water-dissolvable release material, poly(vinyl alcohol), as a tool for handling, ...

[1]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[2]  Bruce K. Gale,et al.  A PDMS-based gas permeation pump for on-chip fluid handling in microfluidic devices , 2006 .

[3]  Z. Amjad Water Soluble Polymers , 2002 .

[4]  D. Bradley,et al.  Polymer Transfer Printing: Application to Layer Coating, Pattern Definition, and Diode Dark Current Blocking , 2008 .

[5]  Ralph G Nuzzo,et al.  Decal transfer microlithography: a new soft-lithographic patterning method. , 2002, Journal of the American Chemical Society.

[6]  G.-J. Wang,et al.  Biodegradable polylactic acid microstructures for scaffold applications , 2008, ArXiv.

[7]  D. Hansford,et al.  Fabrication of pH-sensitive Microparticles for Drug Delivery Applications Using Soft Lithography Techniques , 2008 .

[8]  L. J. Lee,et al.  Self-folding of three-dimensional hydrogel microstructures. , 2005, The journal of physical chemistry. B.

[9]  M Wessling,et al.  Membranes and microfluidics: a review. , 2006, Lab on a chip.

[10]  L. Chernozatonskii,et al.  Graphene-based semiconductor nanostructures , 2013 .

[11]  Jie Xu,et al.  Use of a porous membrane for gas bubble removal in microfluidic channels: physical mechanisms and design criteria , 2010, 1005.0107.

[12]  N. Voelcker,et al.  Recent developments in PDMS surface modification for microfluidic devices , 2010, Electrophoresis.

[13]  M. Madou Fundamentals of microfabrication , 1997 .

[14]  K. Kendall Thin-film peeling-the elastic term , 1975 .

[15]  Yonggang Huang,et al.  Transfer printing by kinetic control of adhesion to an elastomeric stamp , 2006 .

[16]  Charles D. Schaper,et al.  Water-soluble polymer templates for high-resolution pattern formation and materials transfer printing , 2004 .

[17]  T. Haraldsson,et al.  Low-stress wafer-level transfer bonding of polymer layers using floatation , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[18]  Z. Amjad Water Soluble Polymers: Solution Properties And Applications , 2013 .

[19]  W van der Wijngaart,et al.  A High-Yield Process for 3-D Large-Scale Integrated Microfluidic Networks in PDMS , 2010, Journal of Microelectromechanical Systems.

[20]  K. Kendall Crack propagation in lap shear joints , 1975 .

[21]  G. Whitesides,et al.  Soft Lithography. , 1998, Angewandte Chemie.

[22]  T. Haraldsson,et al.  PCR on a PDMS-based microchip with integrated bubble removal , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[23]  Leslie Y Yeo,et al.  Microfluidic devices for bioapplications. , 2011, Small.

[24]  G. Whitesides,et al.  Water-soluble sacrificial layers for surface micromachining. , 2005, Small.

[25]  D. Hansford,et al.  Fabrication of polymer microstructures for MEMS: sacrificial layer micromolding and patterned substrate micromolding , 2007, Biomedical microdevices.

[26]  J. Wikswo,et al.  Poly(vinyl alcohol) as a structure release layer for the microfabrication of polymer composite structures , 2007 .

[27]  3D integration of heterogeneous MEMS structures by stamping transfer , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).