A Novel MEMS Fractal Inductor Based on Hilbert Curve

Being critical component in high performance, MMIC On-chip inductor plays an important role in modern microwave communication facilities. A novel MEMS fractal inductor based on Hilbert curve is presented. By using MEMS technique, inductor is fabricated on silicon substrate with geometry of fractal Hilbert curve pattern. The back side of substrate is etched to generate suspended thin film structure. The fabrication technique is compatible with CMOS process. Compared with planer spiral and winding form inductor, the inductance of MEMS fractal inductor improved more than 50%. The MEMS fractal inductor can be integrated with MMIC chip and satisfy the demand for modern RF communication devices.

[1]  Sang-Ki Yun,et al.  Novel high-Q bondwire inductor for MMIC , 1998 .

[2]  Gudrun Fischer,et al.  RF MEMS for Ubiquitous Wireless Connectivity: Part 2--Application-Part Two covers the utilization of , 2004 .

[3]  Liping Yu,et al.  Acoustic band gap filter designs as a potential future RF MEMS technology: An introduction to fractal silicon-based ABG filters , 2007, 2007 Internatonal Conference on Microelectronics.

[4]  Benoit B. Mandelbrot,et al.  Fractal Geometry of Nature , 1984 .

[5]  Thomas H. Lee,et al.  The Design of CMOS Radio-Frequency Integrated Circuits: RF CIRCUITS THROUGH THE AGES , 2003 .

[6]  T.H. Lee,et al.  A physical model for planar spiral inductors on silicon , 1996, International Electron Devices Meeting. Technical Digest.

[7]  James Lyke,et al.  Fractal antenna with RF MEMS switches for multiple frequency applications , 2002, IEEE Antennas and Propagation Society International Symposium (IEEE Cat. No.02CH37313).

[8]  Pasqualina M. Sarro,et al.  IC-compatible two-level bulk micromachining process module for RF silicon technology , 2001 .

[9]  H. Greenhouse,et al.  Design of Planar Rectangular Microelectronic Inductors , 1974 .

[10]  H.J. De Los Santos,et al.  RF MEMS for ubiquitous wireless connectivity. Part II. Application , 2004, IEEE Microwave Magazine.

[11]  K. J. Vinoy,et al.  RF MEMS and reconfigurable conformal fractal antennas , 2001 .

[12]  H. Samavati,et al.  Fractal capacitors , 1998, 1998 IEEE International Solid-State Circuits Conference. Digest of Technical Papers, ISSCC. First Edition (Cat. No.98CH36156).

[13]  J. R. Long,et al.  Modeling, characterization and design of monolithic inductors for silicon RFICs , 1996, Proceedings of Custom Integrated Circuits Conference.

[14]  Stephen P. Boyd,et al.  Simple accurate expressions for planar spiral inductances , 1999, IEEE J. Solid State Circuits.