论文信息 - Measurement of friction force electrochemical buffing and chemical polishing to decrease sliding friction in high vacuum with control of surface nano roughness - 字舞流文

Measurement of friction force electrochemical buffing and chemical polishing to decrease sliding friction in high vacuum with control of surface nano roughness

A. Kasahara | M. Goto | M. Tosa | K. Yoshihara

[1] The Development of Materials for the Future Vacuum Technology. Surface Treatment by Surface Precipitation for Reduction of Outgassing. , 1993 .

[2] Y. Ando,et al. The Effect of Asperity Array Geometry on Friction and Pull-Off Force , 1997 .

[3] Super clean substrate transport by extreme high vacuum integrated process with levitation transfer systems , 2001 .