Ultra-short period X-ray mirrors: Production and investigation

Abstract Technological problems that deal with manufacturing of highly effective ultra-short ( d =0.7–3.2 nm) period X-ray multilayer mirrors (MLM) are discussed in the article. In an example of Cr/Sc and W/B 4 C MLM it is experimentally shown, that the problem of periodicity and selectivity for multilayer dispersive X-ray elements has been generally solved by now. However, the problem of short-period MLM reflectivity increase related to existing of transitive borders between layers in structures remains rather urgent. The new technique of tungsten deposition using the RF source in order to decrease roughness in borders is discussed and tested. The results of measurements on wavelengths of 0.154, 0.834 and 1.759 nm are given. The RbAP crystals ordinary used in experiments and short-period W/B 4 C MLM produced are compared. The specular and non-specular characteristics of scattering on the 0.154 nm wavelengths are also measured in order to study transitive borders structures.