Performance of molecular-beam epitaxy-grown midwave infrared HgCdTe detectors on four-inch Si substrates and the impact of defects

We are continuing development of the growth of midwave infrared (MWIR) HgCdTe by molecular-beam epitaxy (MBE) on 4-in. Si substrates and the fabrication of state-of-the-art detectors and focal plane arrays (FPAs). Array formats of up to 2048 × 2048 and unit cells as small as 20 µm have been made. We regularly measure response operability values in excess of 99% on these arrays. These values typically exceed expectations, with the number of outages corresponding to as-grown defect densities four times lower than what we measure. We have investigated this operability discrepancy and now can account for it. Comparisons of measured properties were used to establish trends between defect occurrence and pixel operability. These correlations show that a combination of defect removal and low-impact defects provide the explanation. Having this knowledge will allow for better operability predictions and assist in efforts to reduce defect impact on FPA performance.

[1]  N. Dhar,et al.  Planar p-on-n HgCdTe heterostructure infrared photodiodes on Si substrates by molecular beam epitaxy , 1997 .

[2]  R. E. Bornfreund,et al.  Developments in the fabrication and performance of high-quality HgCdTe detectors grown on 4-in. Si substrates , 2002 .

[3]  R. E. Bornfreund,et al.  Fabrication of high-performance large-format MWIR focal plane arrays from MBE-grown HgCdTe on 4″ silicon substrates , 2001 .

[4]  T. Parodos,et al.  Advances in composition control for 16 µm LPE P-on-n HgCdTe heterojunction photodiodes for remote sensing applications at 60K , 1999 .

[5]  K. Hess,et al.  LPE HgCdTe on sapphire status and advancements , 2001 .

[6]  Rajesh D. Rajavel,et al.  Heteroepitaxy of HgCdTe(112) infrared detector structures on Si(112) substrates by molecular-beam epitaxy , 1996 .

[7]  J. Rosbeck,et al.  Effect of dislocations on the electrical and optical properties of long‐wavelength infrared HgCdTe photovoltaic detectors , 1992 .

[8]  Manijeh Razeghi,et al.  Narrow-gap semiconductor photodiodes , 2000, Photonics West.

[9]  S. Sivananthan,et al.  Molecular beam epitaxy and characterization of HgCdTe(111)B on Si(100) , 1991 .

[10]  W. Makky Infrared Detectors: State of the Art , 1992 .

[11]  G. M. Venzor,et al.  MBE growth of HgCdTe on silicon substrates for large-area infrared focal plane arrays: A review of recent progress , 1999 .

[12]  R. E. Bornfreund,et al.  MBE growth of HgCdTe on silicon substrates for large format MWIR focal plane arrays , 2001 .

[13]  Bonnie A. Baumgratz,et al.  Direct growth of CdZnTe/Si substrates for large-area HgCdTe infrared focal plane arrays , 1995 .