A Microsensor With Integrated Heat Sink And Flow Guide For Gas Flow Sensing Applications

A microsensor for gas flow sensing applications with high sensitivity (700 mV at a flow velocity of 2.7 m/s and a supply voltage of 3 V), low power consumption (8mW at 55K over-temperature and an air flow velocity of 0.8 m/s) and short response time is presented. A heat sink and flow guide integrated on the backside of the microsensor is used to modulate the temperature distribution on the diaphragm to achieve an extended measurement range. Results from device simulation, technological processing and sensor performance are discussed.