Highly Transparent and Conductive ZnO: Al Thin Films from a Low Temperature Aqueous Solution Approach

A solution deposition approach for high-performance aluminum-doped zinc oxide (AZO) thin films (visible transparency > 90% and sheet resistance down to 25 Ω/sq) with process temperatures not exceeding 85 °C is presented. This allows the non-vacuum deposition of AZO on temperature sensitive substrates such as polymer films for flexible and transparent electronics, or inorganic and organic thin film photovoltaics.

[1]  R. Zhuo,et al.  The effect of Al doping on the morphology and optical property of ZnO nanostructures prepared by hydrothermal process , 2009 .

[2]  Peidong Yang,et al.  General route to vertical ZnO nanowire arrays using textured ZnO seeds. , 2005, Nano letters.

[3]  G. Hodes.  Semiconductor and ceramic nanoparticle films deposited by chemical bath deposition. , 2007, Physical chemistry chemical physics : PCCP.

[4]  M. V. Van Bael,et al.  Oxide electronics: Like wildfire. , 2011, Nature materials.

[5]  M. Niederberger,et al.  Microwave-Assisted Nonaqueous Sol–Gel Synthesis: From Al:ZnO Nanoparticles to Transparent Conducting Films , 2013 .

[6]  Akio Suzuki,et al.  Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition , 2003 .

[7]  T. Minami.  Transparent conducting oxide semiconductors for transparent electrodes , 2005 .

[8]  G. Hodes,et al.  Reliable chemical bath deposition of ZnO films with controllable morphology from ethanolamine-based solutions using KMnO4 substrate activation , 2009 .

[9]  D. Lincot,et al.  Solution growth of functional zinc oxide films and nanostructures , 2010 .

[10]  Hadis Morkoç,et al.  Transparent conducting oxides for electrode applications in light emitting and absorbing devices , 2010 .

[11]  Jean-François Guillemoles,et al.  Stability Issues of Cu(In,Ga)Se2-Based Solar Cells , 2000 .

[12]  F. Ruske,et al.  Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering , 2008 .

[13]  E. Boyden,et al.  Face-selective electrostatic control of hydrothermal zinc oxide nanowire synthesis. , 2011, Nature materials.

[14]  Ajaya K. Sigdel,et al.  Oriented Growth of Al2O3:ZnO Nanolaminates for Use as Electron‐Selective Electrodes in Inverted Polymer Solar Cells , 2012 .

[15]  R. O’Hayre,et al.  Solution processing of transparent conductors: from flask to film. , 2011, Chemical Society reviews.

[16]  E. Fortunato,et al.  Zinc oxide as an ozone sensor , 2004 .

[17]  Wolfgang Kowalsky,et al.  Indium-free transparent organic light emitting diodes with Al doped ZnO electrodes grown by atomic layer and pulsed laser deposition , 2008 .

[18]  T. A. Vijayan,et al.  Effect of heat treatment on microstructural and optical properties of CBD grown Al-doped ZnO thin films , 2011 .

[19]  H. Fukui,et al.  Preparation of Al‐doped ZnO films by aqueous solution process using a continuous circulation reactor , 2012 .

[20]  Huifang Xu,et al.  Complex and oriented ZnO nanostructures , 2003, Nature materials.

[21]  Xin Jiang,et al.  Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method , 2007 .

[22]  K. Ellmer.  Past achievements and future challenges in the development of optically transparent electrodes , 2012, Nature Photonics.

[23]  M. Shatzkes,et al.  Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces , 1970 .

[24]  F. J. Pern,et al.  Variations in damp heat-induced degradation behavior of sputtered ZnO window layer for CIGS solar cells , 2010, Optics + Photonics for Sustainable Energy.

[25]  C. Granqvist.  Oxide electrochromics: An introduction to devices and materials , 2012 .

[26]  M. Zeman,et al.  Growth of ZnOx:Al by high-throughput CVD at atmospheric pressure , 2012 .

[27]  Deposition of Well-Aligned ZnO Nanorods at 50 °C on Metal, Semiconducting Polymer, and Copper Oxides Substrates and Their Structural and Optical Properties , 2010 .

[28]  F. Lange,et al.  Controlling Low Temperature Aqueous Synthesis of ZnO. 1. Thermodynamic Analysis , 2009 .

[29]  C. Granqvist.  Transparent conductors as solar energy materials: A panoramic review , 2007 .

[30]  M. Halik,et al.  Overcoming interface losses in organic solar cells by applying low temperature, solution processed aluminum-doped zinc oxide electron extraction layers , 2013 .