论文信息 - Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesized in thin SiO2 layers - 字舞流文

Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesized in thin SiO2 layers

A. Claverie | M. Carrada | D. Chassaing | D. Tsoukalas | P. Normand | C. Bonafos | G. Assayag | V. Soncini